JPS62136709A - Manufacture of conductive pattern - Google Patents

Abstract

(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a method of forming a conductive pattern on the surface of a substrate. More specifically, the present invention relates to a method of forming a conductive pattern by forming a five-membered heterocyclic compound polymer in a pattern on the surface of a substrate.

[Conventional technology]

Polymers of five-membered heterocyclic compounds are relatively stable conductive polymers, and have recently been developed as organic conductive materials that can be used for various functional devices such as battery materials, sensor materials, optoelectronic materials, and electronic devices. Attention has been paid. When used in these functional devices, if these five-membered heterocyclic compound polymers are formed into a device pattern, the range of applications will be extremely wide. As such a method, a method has been proposed in which polypyrrole is formed in a pattern in an insulating polymer film using an electrochemical method. (flikita et al, Japan
J.

Appl, Phys, Lett, 24 L79
(1985)], however, this method requires a special electrode, can only be formed on a soluble polymer film, and can only obtain a film thickness of several microns.

[Problem that the invention seeks to solve]

In view of the above, an object of the present invention is to provide a method for easily forming a conductive pattern on a base material.

[Failure to solve the problem]

In order to solve the above problems, the present inventors conducted intensive studies and completed the present invention.

That is, the present invention uses a base material whose surface has grooves formed in a pattern,
The method is characterized by casting an oxidizing agent in liquid form or dissolved in a solvent into the grooves, and then contacting the oxidizing agent with the five-membered heterocyclic compound to form a polymer of the five-membered heterocyclic compound in a pattern on the surface of the substrate. This is a method for forming a conductive pattern.

There are no particular restrictions on the material of the base material used in the method of the present invention, and almost any material can be used, from semiconductors to insulators, and it can be formed into any shape, including thin films and thick films. You can use your body.

In the method of the present invention, it is necessary to process and form grooves in a pattern on the surface of these base materials in advance, but the grooves can be formed using ordinary processing techniques ( There are no particular restrictions on the method.

In the method of the present invention, an inorganic acid, a metal compound, an inorganic or organic oxide, a peroxide, etc. are used as the oxidizing agent. Specifically, for example, inorganic acids such as hydrochloric acid, sulfuric acid, nitric acid, and chlorosulfonic acid, titanium, zirconium, chromium, molybdenum, tungsten, manganese, iron, ruthenium, palladium, platinum, and metal halogens such as aluminum and tin. Suitable oxidizing agents include compounds of these metals, or inorganic acid salts of these metals, and in particular compounds of these metals known as Lewis acids, as well as acetylacetonates of these metals. Coordination compounds may also be mentioned.

Further examples include salts of peracids such as beroxonisulfuric acid and percarbonic acid, benzoquinone and organic peroxides. These oxidizing agents can be used alone or in combination of two or more.

Further, in the method of the present invention, it is necessary to use the oxidizing agent in a liquid state, and the oxidizing agent is used either in liquid form or dissolved in a solvent.

The solvent to be used is not particularly limited as long as it dissolves the oxidizing agent, and examples include alcohols, halogenated hydrocarbons, aromatic hydrocarbons, nitrated hydrocarbons, ethers, nitriles, and water. Can be mentioned. Further, at this time, various polymers and oligomers can be added to the solvent as binders.

The 5-membered heterocyclic compound used in the method of the present invention is 4(
Compounds whose basic skeleton is an unsaturated 5-membered ring having a carbon atom of IM and a heteroatom of 1 can be used alone or in combination of two or more.

In the polymerization method of the present invention, first, an oxidizing agent in liquid form or dissolved in a solvent is cast into grooves formed in a pattern. There are no special restrictions on the casting method, and a general method can be used. For example, a method is used in which a liquid oxidizing agent is spread over the entire surface of the base material, and then the excess oxidizing agent is wiped off.

It is then brought into contact with a 5-membered heterocyclic compound. This contact method includes a method in which the five-membered heterocyclic compound is dissolved in a solvent that does not dissolve the base material and the oxidizing agent, and the base material is immersed therein;
Alternatively, a method of exposing the base material to the vapor of the five-membered heterocyclic compound may be used, and a method of bringing the base material into contact with the vapor of the five-membered heterocyclic compound is particularly preferred.

In this way, a five-membered heterocyclic compound can be formed in a pattern on the surface of the base material, and a conductive pattern can be formed.

〔Example〕

The present invention will be explained in more detail with reference to Examples below.

Example-1 Polymethyl methacrylic acid plate (2 cm x 5 cm, thickness 2
1■) Width 50 microns, length 3 graves, depth 30 on the surface
The pattern shown in FIG. 1 was formed by cutting micron grooves at intervals of 100 microns and connecting them.

In the figure, A and B indicate the deposited gold, and C indicates the portion removed after the conductive pattern was formed. iron(III) chloride
- A solution of 1 g of hexahydrate dissolved in 50 mff of methanol was used as an oxidizing agent, and after casting on the plate, excess oxidizing agent was wiped off. When this plate was placed in a desiccator and nitrogen gas saturated with pyrrole was passed through it, polypyrrole was polymerized in a pattern according to the pattern shown in FIG.

The resistance value between B was ]9Ω, and when the 0 part in the figure was removed, the resistance value was 20MΩ or more.

Example-2 Glass plate (2cm x 5 CJI+, thickness 0.5mm
) The pattern shown in Figure 1 was etched into the surface with grooves of 50 microns in diameter and 20 microns in depth. A nitromethane solution saturated with anhydrous iron chloride (II[) was used as the oxidizing agent solution and was cast onto the glass plate, and then the excess oxidizing agent was wiped off. Place this glass plate in a desiccator,
When nitrogen gas saturated with thiophene was passed through, polythiophene was polymerized in a pattern, and the resistance between A and I3 was 4Ω, and after removing part 0, the resistance was more than 20MΩ. .

Examples 3 and 4 Example 2 was carried out in the same manner as in Example 2, except that furan and selenophene were used instead of thiophene. Polyfuran and polyselenophene were polymerized in a pattern, respectively. The resistance value between A and B is 15MΩ each.
, 850 KΩ, and the resistances after removing C were both 20 MΩ or more.

〔Effect of the invention〕

According to the method of the present invention, conductive patterns can be easily and industrially advantageously formed on the surfaces of substrates made of various materials.

[Brief explanation of drawings]

FIG. 1 shows an example of the conductive pattern of the present invention.

Claims (1)

[Claims] Using a base material with patterned grooves formed on its surface, a liquid or solvent-dissolved oxidizing agent is cast into the grooves, and then brought into contact with a five-membered heterocyclic compound to create a patterned pattern on the surface of the substrate. 1. A method for forming a conductive pattern, which comprises producing a five-membered heterocyclic compound polymer.