JPS6213619B2 - - Google Patents

Info

Publication number
JPS6213619B2
JPS6213619B2 JP13841978A JP13841978A JPS6213619B2 JP S6213619 B2 JPS6213619 B2 JP S6213619B2 JP 13841978 A JP13841978 A JP 13841978A JP 13841978 A JP13841978 A JP 13841978A JP S6213619 B2 JPS6213619 B2 JP S6213619B2
Authority
JP
Japan
Prior art keywords
insulator
oxide film
charge trapping
measuring
current
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP13841978A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5565146A (en
Inventor
Koichiro Ootori
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute of Advanced Industrial Science and Technology AIST
Original Assignee
Agency of Industrial Science and Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency of Industrial Science and Technology filed Critical Agency of Industrial Science and Technology
Priority to JP13841978A priority Critical patent/JPS5565146A/ja
Publication of JPS5565146A publication Critical patent/JPS5565146A/ja
Publication of JPS6213619B2 publication Critical patent/JPS6213619B2/ja
Granted legal-status Critical Current

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  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP13841978A 1978-11-11 1978-11-11 Characteristic measuring method for charge trap center in insulator Granted JPS5565146A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13841978A JPS5565146A (en) 1978-11-11 1978-11-11 Characteristic measuring method for charge trap center in insulator

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13841978A JPS5565146A (en) 1978-11-11 1978-11-11 Characteristic measuring method for charge trap center in insulator

Publications (2)

Publication Number Publication Date
JPS5565146A JPS5565146A (en) 1980-05-16
JPS6213619B2 true JPS6213619B2 (enrdf_load_stackoverflow) 1987-03-27

Family

ID=15221516

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13841978A Granted JPS5565146A (en) 1978-11-11 1978-11-11 Characteristic measuring method for charge trap center in insulator

Country Status (1)

Country Link
JP (1) JPS5565146A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2023228338A1 (ja) * 2022-05-25 2023-11-30 株式会社日立ハイテク 荷電粒子線装置、計測方法

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102213693B (zh) * 2011-04-08 2012-10-10 北京大学 无衬底引出半导体器件的栅介质层陷阱密度的测试方法
CN104198570B (zh) * 2014-09-10 2016-08-17 国家电网公司 反向偏压下测量短路电流衰减计算陷阱参数的装置和方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2023228338A1 (ja) * 2022-05-25 2023-11-30 株式会社日立ハイテク 荷電粒子線装置、計測方法

Also Published As

Publication number Publication date
JPS5565146A (en) 1980-05-16

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