JPS62134Y2 - - Google Patents
Info
- Publication number
- JPS62134Y2 JPS62134Y2 JP1980041979U JP4197980U JPS62134Y2 JP S62134 Y2 JPS62134 Y2 JP S62134Y2 JP 1980041979 U JP1980041979 U JP 1980041979U JP 4197980 U JP4197980 U JP 4197980U JP S62134 Y2 JPS62134 Y2 JP S62134Y2
- Authority
- JP
- Japan
- Prior art keywords
- filament
- getter material
- tube body
- terminal seat
- pump
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000000463 material Substances 0.000 claims description 29
- 229910052751 metal Inorganic materials 0.000 claims description 11
- 239000002184 metal Substances 0.000 claims description 11
- 230000008022 sublimation Effects 0.000 claims description 7
- 238000000859 sublimation Methods 0.000 claims description 7
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 claims description 5
- 229910052721 tungsten Inorganic materials 0.000 claims description 4
- 239000010937 tungsten Substances 0.000 claims description 4
- 239000012777 electrically insulating material Substances 0.000 claims description 3
- 239000012212 insulator Substances 0.000 claims description 3
- 230000000149 penetrating effect Effects 0.000 claims 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 10
- 239000010936 titanium Substances 0.000 description 6
- 229910052719 titanium Inorganic materials 0.000 description 6
- 238000009792 diffusion process Methods 0.000 description 4
- 239000007789 gas Substances 0.000 description 4
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 2
- 229910052750 molybdenum Inorganic materials 0.000 description 2
- 239000011733 molybdenum Substances 0.000 description 2
- ZSLUVFAKFWKJRC-IGMARMGPSA-N 232Th Chemical compound [232Th] ZSLUVFAKFWKJRC-IGMARMGPSA-N 0.000 description 1
- OYPRJOBELJOOCE-UHFFFAOYSA-N Calcium Chemical compound [Ca] OYPRJOBELJOOCE-UHFFFAOYSA-N 0.000 description 1
- 229910052684 Cerium Inorganic materials 0.000 description 1
- 108010083687 Ion Pumps Proteins 0.000 description 1
- FYYHWMGAXLPEAU-UHFFFAOYSA-N Magnesium Chemical compound [Mg] FYYHWMGAXLPEAU-UHFFFAOYSA-N 0.000 description 1
- 229910052776 Thorium Inorganic materials 0.000 description 1
- 229910052770 Uranium Inorganic materials 0.000 description 1
- QCWXUUIWCKQGHC-UHFFFAOYSA-N Zirconium Chemical compound [Zr] QCWXUUIWCKQGHC-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 229910052788 barium Inorganic materials 0.000 description 1
- DSAJWYNOEDNPEQ-UHFFFAOYSA-N barium atom Chemical compound [Ba] DSAJWYNOEDNPEQ-UHFFFAOYSA-N 0.000 description 1
- 229910052791 calcium Inorganic materials 0.000 description 1
- 239000011575 calcium Substances 0.000 description 1
- GWXLDORMOJMVQZ-UHFFFAOYSA-N cerium Chemical compound [Ce] GWXLDORMOJMVQZ-UHFFFAOYSA-N 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 230000004927 fusion Effects 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 1
- 229910052749 magnesium Inorganic materials 0.000 description 1
- 239000011777 magnesium Substances 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 239000010445 mica Substances 0.000 description 1
- 229910052618 mica group Inorganic materials 0.000 description 1
- 229910052758 niobium Inorganic materials 0.000 description 1
- 239000010955 niobium Substances 0.000 description 1
- GUCVJGMIXFAOAE-UHFFFAOYSA-N niobium atom Chemical compound [Nb] GUCVJGMIXFAOAE-UHFFFAOYSA-N 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 238000005086 pumping Methods 0.000 description 1
- 238000004088 simulation Methods 0.000 description 1
- 229910052712 strontium Inorganic materials 0.000 description 1
- CIOAGBVUUVVLOB-UHFFFAOYSA-N strontium atom Chemical compound [Sr] CIOAGBVUUVVLOB-UHFFFAOYSA-N 0.000 description 1
- 229910052715 tantalum Inorganic materials 0.000 description 1
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 1
- JFALSRSLKYAFGM-UHFFFAOYSA-N uranium(0) Chemical compound [U] JFALSRSLKYAFGM-UHFFFAOYSA-N 0.000 description 1
- 229910052845 zircon Inorganic materials 0.000 description 1
- 229910052726 zirconium Inorganic materials 0.000 description 1
- GFQYVLUOOAAOGM-UHFFFAOYSA-N zirconium(iv) silicate Chemical compound [Zr+4].[O-][Si]([O-])([O-])[O-] GFQYVLUOOAAOGM-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Electron Tubes For Measurement (AREA)
Description
【考案の詳細な説明】
本考案は超真空ポンプに関し、更に詳しくは熱
電子の衝撃によりゲツタ材を昇華させ、そのゲツ
タ作用により超高真空迄排気する小型サブリメー
シヨンポンプに関するものである。[Detailed Description of the Invention] The present invention relates to an ultra-vacuum pump, and more particularly to a small-sized sublimation pump that sublimates a getter material by thermionic bombardment and evacuates to an ultra-high vacuum by the getter action.
従来高真空排気装置としては油拡散ポンプが使
用され、その到達圧力は10-6〜10-7Torrである。
近年核融合をめざすプラズマ実験や、高エネルギ
ー原子核実験装置、電子機器用部品や材料の処理
装置、宇宙空間の模擬試験装置等、各分野に於
て、10-7〜10-9Torrの超高真空排気装置が要求さ
れている。 Conventionally, an oil diffusion pump has been used as a high vacuum evacuation device, and its ultimate pressure is 10 -6 to 10 -7 Torr.
In recent years, ultra-high temperatures of 10 -7 to 10 -9 Torr have been used in various fields such as plasma experiments aimed at nuclear fusion, high-energy nuclear experiment equipment, processing equipment for electronic equipment parts and materials, and space simulation test equipment. Vacuum exhaust equipment is required.
超真空排気するためには油拡散ポンプによる排
気系にイオンポンプ又はゲツタポンプを追加して
用いたり、或は油拡散ポンプに替えて分子ポンプ
が用いられているが、これら従来の超高真空排気
装置は構造が大規模で、設備費も高価であり、又
既存の排気系を改造して更に超高真空化しようと
する場合には既設装置への組込みが困難である場
合が多い。 In order to perform ultra-high vacuum evacuation, an ion pump or getter pump is added to the evacuation system using an oil diffusion pump, or a molecular pump is used in place of the oil diffusion pump, but these conventional ultra-high vacuum evacuation systems The structure is large-scale and the equipment cost is expensive, and when an existing exhaust system is modified to achieve an ultra-high vacuum, it is often difficult to incorporate it into existing equipment.
特に従来のゲツタポンプは、実公昭45−32187
号、実公昭45−8529号、実公昭44−11020号に示
されるように、いずれもチタン、モリブデン、ジ
ルコン等のゲツタ材よりなる金属ブロツクを陽極
として用い、ゲツタ材が蒸発して陽極が消耗して
くるとこれを交換するようになつていた。その交
換の煩度を少くするために、大型の金属ブロツク
を用いる必要があり、このためゲツタポンプ全体
が大型となり、ゲツタポンプを既存の排気系にそ
のまゝ付加して使用することはできなかつた。更
にゲツタ材よりなる金属ブロツクを陽極として用
いると、陽極が消耗するにつれて陰極のフイラメ
ントと陽極の間隔が徐々に拡がり、一定の間隔に
保つことができず、ゲツタポンプを常に一定の条
件で作動させることは不可能であつた。 In particular, the conventional Getsuta pump is
As shown in Japanese Utility Model No. 45-8529 and Utility Model Publication No. 44-11020, a metal block made of getter material such as titanium, molybdenum, zircon, etc. is used as an anode, and the getter material evaporates and the anode is consumed. As time went on, I started to replace this. In order to reduce the trouble of replacing the pump, it is necessary to use a large metal block, which increases the size of the entire getter pump, making it impossible to use the getter pump by simply adding it to an existing exhaust system. Furthermore, when a metal block made of Getta material is used as an anode, as the anode wears out, the distance between the cathode filament and the anode gradually widens, making it impossible to maintain a constant spacing, making it difficult to operate the Getta pump under constant conditions. was impossible.
上述の従来の装置の欠点に鑑みて、本考案は極
めて簡単な構造で且つ小型で容易に既存の高真空
排気系に追加して取付けて超高真空を得ることが
できると共に、陰極フイラメントと陽極のゲツタ
材の間隔を常々一定に調節して、一定条件で作動
させることができる小型サブリメーシヨンポンプ
を提供するものである。 In view of the above-mentioned drawbacks of the conventional devices, the present invention has an extremely simple structure, is compact, and can be easily added to an existing high vacuum evacuation system to obtain an ultra-high vacuum. To provide a small sublimation pump that can be operated under constant conditions by constantly adjusting the spacing between the getter materials.
即ち本考案の要旨とするところは、電流を流し
て加熱した金属フイラメントに近接してチタン等
の金属線材よりなるゲツタ材の先端を摺動自在で
進退可能に配設し、前記金属フイラメントとゲツ
タ材の間に直流高電圧をゲツタ材を陽極として印
加して、金属フイラメントから放出された熱電子
をゲツタ材に衝突させ、その電子衝撃により、ゲ
ツタ材の金属原子を昇華させ、この金属原子が気
体分子と化合してこれを捕捉し、容器壁等に沈着
し排気するようにした小型サブリメーシヨンポン
プにある。 That is, the gist of the present invention is that the tip of a getter material made of a metal wire such as titanium is disposed so as to be slidable and retractable in proximity to a metal filament heated by passing an electric current, and A high DC voltage is applied between the materials, using the getter material as an anode, and thermionic electrons emitted from the metal filament collide with the getter material, and the electron impact sublimates the metal atoms in the getter material. This is a small sublimation pump that combines with gas molecules, captures them, deposits them on the walls of a container, and exhausts them.
本考案で用いられるゲツタ材としては、金属チ
タンが好ましく用いられる。蒸発したチタン原子
は酸素、窒素等不活性ガス以外の気体分子と化学
結合し、器壁に沈着して効率よく排気する。排気
すべき気体の種類に応じてアルミニウム、ジルコ
ニウム、モリブデン、ニオブ、タンタル、タング
ステン、バリウム、セリウム、ストロンチウム、
トリウム、ウラン、マグネシウム、カルシウム等
も用いることができる。 As the getter material used in the present invention, metallic titanium is preferably used. The evaporated titanium atoms chemically bond with gas molecules other than inert gases, such as oxygen and nitrogen, and are deposited on the vessel wall for efficient exhaustion. Depending on the type of gas to be exhausted, aluminum, zirconium, molybdenum, niobium, tantalum, tungsten, barium, cerium, strontium,
Thorium, uranium, magnesium, calcium, etc. can also be used.
熱電子を放出させるフイラメントとしては、通
常コイル状タングステンフイラメントが用いられ
るが、他の高融点金属フイラメントも用いること
ができる。 A coiled tungsten filament is usually used as the filament that emits thermoelectrons, but other high melting point metal filaments can also be used.
次に図面により本考案の内容を更に具体的に説
明する。第１図は本考案の小型サブリメーシヨン
ポンプの一部断面正面図である。１は管体、２は
フツ素樹脂等の電気絶縁材料で作られた端子座
で、これにガスケツト３を介して電極４，４′を
挿通し、座金５及びナツト６で端子座２に締結す
ると共に、導線７，７′を接続する。端子座２の
中央に棒状金属チタン製のゲツタ材８を挿通し、
Ｏリング９を介して絶縁材製ボルト１０で締付け
てゲツタ材８を端子座に気密で且つ位置摺動調節
可能に固定する。管体１と端子座２はガスケツト
１１を介し、フツ素樹脂等の電気絶縁材製袋ナツ
ト１２で締付けて耐真空構造となしてある。電極
端子４，４′にそれぞれ碍管１３で保護したリー
ド線１４，１４′の基端をビス１５で固着する。
リード線１４，１４′は管体１の内側に嵌合した
マイカ等の絶縁板１６に挿通し、絶縁板１６の中
央のガイド孔２３に取付けたガイドパイプ１７を
通してゲツタ材８を挿通し、ゲツタ材８とリード
線１４，１４′及び管体１が並行で互に接触しな
いように保持する。２本のリード線１４，１４′
の先端にタングステンコイルよりなるフイラメン
ト１８の両端を接続する。フイラメントの中央よ
り約２mmの間隔を保つようにゲツタ材８の先端を
配設する。上記装置全体を管体１の外側に固着し
た取付金具１９により真空装置の真空計取付座２
０に取付ける。又第２図に示す如く管体１の外側
に取付けたフランジ２１により真空装置のノズル
部２２に取付けることもできる。 Next, the contents of the present invention will be explained in more detail with reference to the drawings. FIG. 1 is a partially sectional front view of the small sublimation pump of the present invention. 1 is a tube body, 2 is a terminal seat made of an electrically insulating material such as fluororesin, into which electrodes 4 and 4' are inserted through a gasket 3, and fastened to the terminal seat 2 with a washer 5 and a nut 6. At the same time, the conducting wires 7 and 7' are connected. Insert the bar-shaped metal titanium getter material 8 into the center of the terminal seat 2,
The getter material 8 is fixed to the terminal seat airtightly and slidably by tightening with an insulating bolt 10 via an O-ring 9. The tube body 1 and the terminal seat 2 are tightened together with a gasket 11 and a bag nut 12 made of an electrically insulating material such as fluororesin to provide a vacuum-resistant structure. The proximal ends of lead wires 14 and 14' protected by insulator tubes 13 are fixed to electrode terminals 4 and 4' with screws 15, respectively.
The lead wires 14, 14' are inserted into an insulating plate 16 made of mica or the like fitted inside the tube body 1, and the getter material 8 is inserted through the guide pipe 17 attached to the guide hole 23 at the center of the insulating plate 16. The material 8, the lead wires 14, 14', and the tube body 1 are held in parallel so that they do not come into contact with each other. Two lead wires 14, 14'
Both ends of a filament 18 made of a tungsten coil are connected to the tip of the filament 18. The tip of the getter material 8 is arranged so as to maintain a distance of about 2 mm from the center of the filament. The entire device is attached to the vacuum gauge mounting seat 2 of the vacuum device by a mounting bracket 19 fixed to the outside of the tube body 1.
Attach to 0. Further, as shown in FIG. 2, it can also be attached to a nozzle portion 22 of a vacuum device by means of a flange 21 attached to the outside of the tube body 1.
本考案の小型サブリメーシヨンポンプの使用に
際しては、先ず真空系内を油拡散ポンプ等により
10-7Torr付近迄排気し、電極端子４，４′間に
10V程度の電圧をかけて、フラメントに電流を流
し加熱する。電極端子４又は４′とゲツタ材８の
間に約１〜2KVの直流電圧をゲツタ材を陽極とし
て印加すると、フイラメント１８から熱電子が放
出され、ゲツタ材に衝突して、その衝撃によりチ
タン原子が叩き出されて昇華する。ゲツタ材は時
間と共に消耗するから連続的又は間欠的にゲツタ
材を挿入し、フイラメントとの間隙をほぼ一定に
保つ。昇華したチタン原子は気体分子と化合して
これを捕捉し、真空系内を10-7〜10-10Torr付近
迄排気することができる。 When using the compact sublimation pump of this invention, first, the inside of the vacuum system must be pumped with an oil diffusion pump, etc.
Exhaust the air to around 10 -7 Torr and connect it between electrode terminals 4 and 4'.
A voltage of about 10V is applied, and a current is passed through the filament to heat it. When a DC voltage of approximately 1 to 2 KV is applied between the electrode terminal 4 or 4' and the getter material 8, with the getter material used as an anode, thermionic electrons are emitted from the filament 18 and collide with the getter material, and the impact causes titanium atoms to form. is knocked out and sublimated. Since the getter material wears out over time, the getter material is inserted continuously or intermittently to keep the gap with the filament almost constant. The sublimated titanium atoms combine with gas molecules and capture them, and the vacuum system can be evacuated to around 10 -7 to 10 -10 Torr.
実施例
直径0.24mmのタングステン線を直径１mmのコイ
ル状に巻き、フイラメントとし、ゲツタ材として
直径３mmのチタン丸棒を用い、印加電気1.1KVで
40ｍＡの電流を流すと、チタン棒の消費は約2.5
mm／ｈで排気速度は約2500l／secであつた。Example A tungsten wire with a diameter of 0.24 mm was wound into a coil with a diameter of 1 mm to form a filament, and a titanium round bar with a diameter of 3 mm was used as the getter material, and an applied electricity of 1.1 KV was used.
When passing a current of 40mA, the consumption of the titanium rod is approximately 2.5
The pumping speed was approximately 2500 l/sec in mm/h.
本考案によれば従来のチタンボールを用いるゲ
ツタポンプ等に比較して極めて小型に構成するこ
とができるため、既存の真空容器の器壁或はその
配管の真空計取付座又は使用していないノズルを
利用して取付けることができる外、使用したゲツ
タ材がほとんどすべて有効に利用でき、又消費電
力も極めてわずかですむ等の著しい効果がある。 According to the present invention, it can be configured to be extremely compact compared to the conventional Getsuta pump etc. that uses titanium balls, so it can be installed on the wall of an existing vacuum vessel, the vacuum gauge mounting seat of its piping, or an unused nozzle. In addition to being easy to use and install, almost all of the getter material used can be used effectively, and the power consumption is extremely low, which is a remarkable effect.
第１図は本考案の小型サブリメーシヨンポンプ
の断面図、第２図は同ポンプを真空装置のノズル
部に取付けた正面図である。
符号の説明、１……管体、２……端子座、３，
１１……ガスケツト、４，４′……電極端子、５
……座金、６……ナツト、７，７′……導線、８
……ゲツタ材、９……Ｏリング、１０……ボル
ト、１２……袋ナツト、１３……碍管、１４，１
４′……リード線、１５……ビス、１６……絶縁
板、１７……ガイドパイプ、１８……フイラメン
ト、１９……取付金具、２０……真空計取付座、
２１……フランジ、２２……ノズル部、２３……
ガイド孔。
FIG. 1 is a sectional view of a small-sized sublimation pump of the present invention, and FIG. 2 is a front view of the same pump attached to a nozzle portion of a vacuum device. Explanation of symbols, 1... tube body, 2... terminal seat, 3,
11... Gasket, 4, 4'... Electrode terminal, 5
...Washer, 6...Nut, 7,7'...Conductor, 8
...Getsuta material, 9...O ring, 10...Bolt, 12...Fall nut, 13...Insulator pipe, 14,1
4'... Lead wire, 15... Screw, 16... Insulating plate, 17... Guide pipe, 18... Filament, 19... Mounting bracket, 20... Vacuum gauge mounting seat,
21...Flange, 22...Nozzle part, 23...
Guide hole.
Claims (1)
脱自在に装着された電気絶縁材料よりなる端子座
と、該端子座に気密に貫通して取付けられた２本
の電磁端子にそれぞれ一端を結合し碍管で被覆さ
れた２本のリード線の他端に両端を接続したタン
グステンコイルよりなるフイラメントと、該管体
の内側に嵌合固定して２本の該リード線を挿通す
ると共に中央にガイド孔を有する絶縁板と、該端
子座にＯリングを介して気密に且つ摺動自在に挿
通され該ガイド孔に嵌合して先端が該フイラメン
ト近傍に達するように位置調節可能に配設された
ゲツタ金属の線材よりなるゲツタ材とを備え有
し、該フイラメントと該ゲツタ材の間に直流高電
圧をゲツタ材を陽極として印加し、金属フイラメ
ントから放出された電子をゲツタ材に衝突させ、
その電子衝撃によりゲツタ材の金属原子を昇華さ
せるようにしたことを特徴とする小型サブリメー
シヨンポンプ。 A tube body, a terminal seat made of an electrically insulating material that is removably attached to airtightly seal one end of the tube body, and two electromagnetic terminals that are attached to each other by penetrating the terminal seat airtightly. A filament made of a tungsten coil whose one end is joined and both ends are connected to the other end of two lead wires covered with an insulator, and the filament is fitted and fixed inside the tube body and the two lead wires are inserted through the filament. An insulating plate having a guide hole in the center, and an insulating plate that is slidably and airtightly inserted into the terminal seat via an O-ring, and is arranged so that its position can be adjusted so that it fits into the guide hole and the tip reaches near the filament. A high DC voltage is applied between the filament and the getter material using the getter material as an anode, and electrons emitted from the metal filament collide with the getter material. let me,
A small sublimation pump characterized by sublimating the metal atoms of the getter material by the electron impact.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1980041979U JPS62134Y2 (en) | 1980-03-27 | 1980-03-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1980041979U JPS62134Y2 (en) | 1980-03-27 | 1980-03-27 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS56152882U JPS56152882U (en) | 1981-11-16 |
| JPS62134Y2 true JPS62134Y2 (en) | 1987-01-06 |
Family
ID=29637362
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1980041979U Expired JPS62134Y2 (en) | 1980-03-27 | 1980-03-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62134Y2 (en) |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4411020Y1 (en) * | 1965-07-22 | 1969-05-07 | ||
| JPS458529Y1 (en) * | 1969-07-17 | 1970-04-22 | ||
| JPS4519967Y1 (en) * | 1970-01-22 | 1970-08-12 | ||
| JPS4532187Y1 (en) * | 1969-10-07 | 1970-12-09 |
-
1980
- 1980-03-27 JP JP1980041979U patent/JPS62134Y2/ja not_active Expired
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4411020Y1 (en) * | 1965-07-22 | 1969-05-07 | ||
| JPS458529Y1 (en) * | 1969-07-17 | 1970-04-22 | ||
| JPS4532187Y1 (en) * | 1969-10-07 | 1970-12-09 | ||
| JPS4519967Y1 (en) * | 1970-01-22 | 1970-08-12 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS56152882U (en) | 1981-11-16 |
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