JPS62134651U - - Google Patents
Info
- Publication number
- JPS62134651U JPS62134651U JP2127286U JP2127286U JPS62134651U JP S62134651 U JPS62134651 U JP S62134651U JP 2127286 U JP2127286 U JP 2127286U JP 2127286 U JP2127286 U JP 2127286U JP S62134651 U JPS62134651 U JP S62134651U
- Authority
- JP
- Japan
- Prior art keywords
- grindstone
- grinding machine
- cutting
- maximum speed
- speed
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Grinding Of Cylindrical And Plane Surfaces (AREA)
Description
第１図は実施例の正面図、第２図はシリコンウ
エハをハーフカツトした状態を示す断面図、第３
図は従来の研削加工機の正面図、第４図および第
５図はその動作説明図である。
各図中、同一符号は同一または相当部分を示し
、１は砥石、２はテーブル、３はマグネツトバイ
ス、４は製品、６は駆動装置、７は制御装置であ
る。
Fig. 1 is a front view of the embodiment, Fig. 2 is a cross-sectional view showing a half-cut silicon wafer, and Fig. 3 is a cross-sectional view of the silicon wafer.
The figure is a front view of a conventional grinding machine, and FIGS. 4 and 5 are explanatory diagrams of its operation. In each figure, the same reference numerals indicate the same or corresponding parts; 1 is a grindstone, 2 is a table, 3 is a magnetic vice, 4 is a product, 6 is a drive device, and 7 is a control device.
Claims (1)
向する位置に製品をセツトしかつ砥石に対して往
復動するテーブルと、このテーブルの往路および
復路の移動速度を変換する制御装置とを備えたこ
とを特徴とする研削加工機。 (2) 変換する移動速度がダウンカツト時に許容
される最高速度およびアツパーカツト時に許容さ
れる最高速度であることを特徴とする実用新案登
録請求の範囲第１項記載の研削加工機。[Scope of Claim for Utility Model Registration] (1) A grindstone that rotates in a certain direction, a table that sets a product at a position facing the grindstone and that moves reciprocally with respect to the grindstone, and the speed of movement of this table in the outward and return directions. A grinding machine characterized by being equipped with a control device for converting. (2) The grinding machine according to claim 1, wherein the moving speed to be converted is the maximum speed allowed for down cutting and the maximum speed allowed for up cutting.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2127286U JPS62134651U (en) | 1986-02-17 | 1986-02-17 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2127286U JPS62134651U (en) | 1986-02-17 | 1986-02-17 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62134651U true JPS62134651U (en) | 1987-08-25 |
Family
ID=30817560
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2127286U Pending JPS62134651U (en) | 1986-02-17 | 1986-02-17 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62134651U (en) |
-
1986
- 1986-02-17 JP JP2127286U patent/JPS62134651U/ja active Pending