JPS62134243U - - Google Patents
Info
- Publication number
- JPS62134243U JPS62134243U JP2057486U JP2057486U JPS62134243U JP S62134243 U JPS62134243 U JP S62134243U JP 2057486 U JP2057486 U JP 2057486U JP 2057486 U JP2057486 U JP 2057486U JP S62134243 U JPS62134243 U JP S62134243U
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor wafer
- probe card
- semiconductor
- corners
- inspection device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 9
- 239000000523 sample Substances 0.000 claims description 7
- 238000007689 inspection Methods 0.000 claims description 3
- 239000008188 pellet Substances 0.000 claims description 3
- 238000000034 method Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 3
Landscapes
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2057486U JPS62134243U (el) | 1986-02-14 | 1986-02-14 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2057486U JPS62134243U (el) | 1986-02-14 | 1986-02-14 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62134243U true JPS62134243U (el) | 1987-08-24 |
Family
ID=30816213
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2057486U Pending JPS62134243U (el) | 1986-02-14 | 1986-02-14 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62134243U (el) |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS54158175A (en) * | 1978-02-21 | 1979-12-13 | Texas Instruments Inc | Four quadrant detector |
| JPS5741657B2 (el) * | 1976-08-20 | 1982-09-04 | ||
| JPS6276637A (ja) * | 1985-09-30 | 1987-04-08 | Fuji Electric Co Ltd | チツプ位置検出装置 |
-
1986
- 1986-02-14 JP JP2057486U patent/JPS62134243U/ja active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5741657B2 (el) * | 1976-08-20 | 1982-09-04 | ||
| JPS54158175A (en) * | 1978-02-21 | 1979-12-13 | Texas Instruments Inc | Four quadrant detector |
| JPS6276637A (ja) * | 1985-09-30 | 1987-04-08 | Fuji Electric Co Ltd | チツプ位置検出装置 |