JPS62134233U - - Google Patents
Info
- Publication number
- JPS62134233U JPS62134233U JP2098286U JP2098286U JPS62134233U JP S62134233 U JPS62134233 U JP S62134233U JP 2098286 U JP2098286 U JP 2098286U JP 2098286 U JP2098286 U JP 2098286U JP S62134233 U JPS62134233 U JP S62134233U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- boat
- support groove
- heat treatment
- inclination angle
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010438 heat treatment Methods 0.000 claims description 6
- 235000012431 wafers Nutrition 0.000 description 4
- 238000010586 diagram Methods 0.000 description 2
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2098286U JPS62134233U (en, 2012) | 1986-02-18 | 1986-02-18 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2098286U JPS62134233U (en, 2012) | 1986-02-18 | 1986-02-18 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62134233U true JPS62134233U (en, 2012) | 1987-08-24 |
Family
ID=30817000
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2098286U Pending JPS62134233U (en, 2012) | 1986-02-18 | 1986-02-18 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62134233U (en, 2012) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010141221A (ja) * | 2008-12-15 | 2010-06-24 | Shin-Etsu Chemical Co Ltd | 酸化膜付きシリコン基板の製造方法 |
-
1986
- 1986-02-18 JP JP2098286U patent/JPS62134233U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010141221A (ja) * | 2008-12-15 | 2010-06-24 | Shin-Etsu Chemical Co Ltd | 酸化膜付きシリコン基板の製造方法 |