JPS62134231U - - Google Patents

Info

Publication number
JPS62134231U
JPS62134231U JP2096086U JP2096086U JPS62134231U JP S62134231 U JPS62134231 U JP S62134231U JP 2096086 U JP2096086 U JP 2096086U JP 2096086 U JP2096086 U JP 2096086U JP S62134231 U JPS62134231 U JP S62134231U
Authority
JP
Japan
Prior art keywords
wafer
storage device
wafers
storing
transfer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2096086U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP2096086U priority Critical patent/JPS62134231U/ja
Publication of JPS62134231U publication Critical patent/JPS62134231U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Devices That Are Associated With Refrigeration Equipment (AREA)
JP2096086U 1986-02-18 1986-02-18 Pending JPS62134231U (US20110009641A1-20110113-C00185.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2096086U JPS62134231U (US20110009641A1-20110113-C00185.png) 1986-02-18 1986-02-18

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2096086U JPS62134231U (US20110009641A1-20110113-C00185.png) 1986-02-18 1986-02-18

Publications (1)

Publication Number Publication Date
JPS62134231U true JPS62134231U (US20110009641A1-20110113-C00185.png) 1987-08-24

Family

ID=30816957

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2096086U Pending JPS62134231U (US20110009641A1-20110113-C00185.png) 1986-02-18 1986-02-18

Country Status (1)

Country Link
JP (1) JPS62134231U (US20110009641A1-20110113-C00185.png)

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