JPS62133090U - - Google Patents
Info
- Publication number
- JPS62133090U JPS62133090U JP2113886U JP2113886U JPS62133090U JP S62133090 U JPS62133090 U JP S62133090U JP 2113886 U JP2113886 U JP 2113886U JP 2113886 U JP2113886 U JP 2113886U JP S62133090 U JPS62133090 U JP S62133090U
- Authority
- JP
- Japan
- Prior art keywords
- body cover
- upper body
- lower body
- cover
- piping
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000005260 corrosion Methods 0.000 claims 1
Landscapes
- Protection Of Pipes Against Damage, Friction, And Corrosion (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1986021138U JPH0313036Y2 (sv) | 1986-02-17 | 1986-02-17 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1986021138U JPH0313036Y2 (sv) | 1986-02-17 | 1986-02-17 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS62133090U true JPS62133090U (sv) | 1987-08-21 |
JPH0313036Y2 JPH0313036Y2 (sv) | 1991-03-26 |
Family
ID=30817305
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1986021138U Expired JPH0313036Y2 (sv) | 1986-02-17 | 1986-02-17 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0313036Y2 (sv) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2016176497A (ja) * | 2015-03-19 | 2016-10-06 | 東京エレクトロン株式会社 | 連結構造及びこれを用いた排気系、基板処理装置、並びにフランジの取り外し方法 |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2004183849A (ja) * | 2002-12-06 | 2004-07-02 | Jc Staff:Kk | 配管継手部の漏水発見装置 |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS55181093U (sv) * | 1979-06-15 | 1980-12-26 |
-
1986
- 1986-02-17 JP JP1986021138U patent/JPH0313036Y2/ja not_active Expired
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS55181093U (sv) * | 1979-06-15 | 1980-12-26 |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2016176497A (ja) * | 2015-03-19 | 2016-10-06 | 東京エレクトロン株式会社 | 連結構造及びこれを用いた排気系、基板処理装置、並びにフランジの取り外し方法 |
Also Published As
Publication number | Publication date |
---|---|
JPH0313036Y2 (sv) | 1991-03-26 |