JPS62133090U - - Google Patents

Info

Publication number
JPS62133090U
JPS62133090U JP2113886U JP2113886U JPS62133090U JP S62133090 U JPS62133090 U JP S62133090U JP 2113886 U JP2113886 U JP 2113886U JP 2113886 U JP2113886 U JP 2113886U JP S62133090 U JPS62133090 U JP S62133090U
Authority
JP
Japan
Prior art keywords
body cover
upper body
lower body
cover
piping
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2113886U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0313036Y2 (es
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1986021138U priority Critical patent/JPH0313036Y2/ja
Publication of JPS62133090U publication Critical patent/JPS62133090U/ja
Application granted granted Critical
Publication of JPH0313036Y2 publication Critical patent/JPH0313036Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Protection Of Pipes Against Damage, Friction, And Corrosion (AREA)
JP1986021138U 1986-02-17 1986-02-17 Expired JPH0313036Y2 (es)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1986021138U JPH0313036Y2 (es) 1986-02-17 1986-02-17

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986021138U JPH0313036Y2 (es) 1986-02-17 1986-02-17

Publications (2)

Publication Number Publication Date
JPS62133090U true JPS62133090U (es) 1987-08-21
JPH0313036Y2 JPH0313036Y2 (es) 1991-03-26

Family

ID=30817305

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986021138U Expired JPH0313036Y2 (es) 1986-02-17 1986-02-17

Country Status (1)

Country Link
JP (1) JPH0313036Y2 (es)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2016176497A (ja) * 2015-03-19 2016-10-06 東京エレクトロン株式会社 連結構造及びこれを用いた排気系、基板処理装置、並びにフランジの取り外し方法

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004183849A (ja) * 2002-12-06 2004-07-02 Jc Staff:Kk 配管継手部の漏水発見装置

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55181093U (es) * 1979-06-15 1980-12-26

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55181093U (es) * 1979-06-15 1980-12-26

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2016176497A (ja) * 2015-03-19 2016-10-06 東京エレクトロン株式会社 連結構造及びこれを用いた排気系、基板処理装置、並びにフランジの取り外し方法

Also Published As

Publication number Publication date
JPH0313036Y2 (es) 1991-03-26

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