JPS62132326U - - Google Patents

Info

Publication number
JPS62132326U
JPS62132326U JP2105286U JP2105286U JPS62132326U JP S62132326 U JPS62132326 U JP S62132326U JP 2105286 U JP2105286 U JP 2105286U JP 2105286 U JP2105286 U JP 2105286U JP S62132326 U JPS62132326 U JP S62132326U
Authority
JP
Japan
Prior art keywords
clean room
air duct
return air
operating panel
wall
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2105286U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP2105286U priority Critical patent/JPS62132326U/ja
Publication of JPS62132326U publication Critical patent/JPS62132326U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Ventilation (AREA)
JP2105286U 1986-02-17 1986-02-17 Pending JPS62132326U (US20030157025A1-20030821-C00031.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2105286U JPS62132326U (US20030157025A1-20030821-C00031.png) 1986-02-17 1986-02-17

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2105286U JPS62132326U (US20030157025A1-20030821-C00031.png) 1986-02-17 1986-02-17

Publications (1)

Publication Number Publication Date
JPS62132326U true JPS62132326U (US20030157025A1-20030821-C00031.png) 1987-08-20

Family

ID=30817139

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2105286U Pending JPS62132326U (US20030157025A1-20030821-C00031.png) 1986-02-17 1986-02-17

Country Status (1)

Country Link
JP (1) JPS62132326U (US20030157025A1-20030821-C00031.png)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0453138U (US20030157025A1-20030821-C00031.png) * 1990-09-06 1992-05-07

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61101732A (ja) * 1984-10-23 1986-05-20 Shimizu Constr Co Ltd クリ−ンル−ム

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61101732A (ja) * 1984-10-23 1986-05-20 Shimizu Constr Co Ltd クリ−ンル−ム

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0453138U (US20030157025A1-20030821-C00031.png) * 1990-09-06 1992-05-07

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