JPS62132169U - - Google Patents

Info

Publication number
JPS62132169U
JPS62132169U JP2074086U JP2074086U JPS62132169U JP S62132169 U JPS62132169 U JP S62132169U JP 2074086 U JP2074086 U JP 2074086U JP 2074086 U JP2074086 U JP 2074086U JP S62132169 U JPS62132169 U JP S62132169U
Authority
JP
Japan
Prior art keywords
substrate
plasma cvd
vacuum chamber
cvd apparatus
shielding
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2074086U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP2074086U priority Critical patent/JPS62132169U/ja
Publication of JPS62132169U publication Critical patent/JPS62132169U/ja
Pending legal-status Critical Current

Links

Classifications

    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00—Energy generation through renewable energy sources
    • Y02E10/50—Photovoltaic [PV] energy

Landscapes

  • Chemical Vapour Deposition (AREA)
  • Photoreceptors In Electrophotography (AREA)
JP2074086U 1986-02-14 1986-02-14 Pending JPS62132169U (OSRAM)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2074086U JPS62132169U (OSRAM) 1986-02-14 1986-02-14

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2074086U JPS62132169U (OSRAM) 1986-02-14 1986-02-14

Publications (1)

Publication Number Publication Date
JPS62132169U true JPS62132169U (OSRAM) 1987-08-20

Family

ID=30816526

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2074086U Pending JPS62132169U (OSRAM) 1986-02-14 1986-02-14

Country Status (1)

Country Link
JP (1) JPS62132169U (OSRAM)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0533141A (ja) * 1991-07-25 1993-02-09 Nissin Electric Co Ltd プラズマによる成膜装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0533141A (ja) * 1991-07-25 1993-02-09 Nissin Electric Co Ltd プラズマによる成膜装置

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