JPS62132128A - Ultraviolet ray monitor - Google Patents
Ultraviolet ray monitorInfo
- Publication number
- JPS62132128A JPS62132128A JP27139085A JP27139085A JPS62132128A JP S62132128 A JPS62132128 A JP S62132128A JP 27139085 A JP27139085 A JP 27139085A JP 27139085 A JP27139085 A JP 27139085A JP S62132128 A JPS62132128 A JP S62132128A
- Authority
- JP
- Japan
- Prior art keywords
- ultraviolet
- sensor
- light
- medium
- ultraviolet ray
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000003595 spectral effect Effects 0.000 claims abstract description 19
- 230000035945 sensitivity Effects 0.000 claims abstract description 14
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims abstract description 12
- 230000003287 optical effect Effects 0.000 claims description 19
- 238000002834 transmittance Methods 0.000 claims description 5
- 239000003365 glass fiber Substances 0.000 claims description 3
- 239000011261 inert gas Substances 0.000 claims description 3
- 239000011521 glass Substances 0.000 claims 1
- 239000010453 quartz Substances 0.000 abstract description 8
- 239000000835 fiber Substances 0.000 abstract description 6
- 239000000463 material Substances 0.000 abstract description 5
- 229910001220 stainless steel Inorganic materials 0.000 abstract description 4
- 239000010935 stainless steel Substances 0.000 abstract description 4
- 230000005855 radiation Effects 0.000 description 6
- 238000010586 diagram Methods 0.000 description 4
- 239000007789 gas Substances 0.000 description 4
- CBENFWSGALASAD-UHFFFAOYSA-N Ozone Chemical compound [O-][O+]=O CBENFWSGALASAD-UHFFFAOYSA-N 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 238000001228 spectrum Methods 0.000 description 2
- 238000010521 absorption reaction Methods 0.000 description 1
- 230000002238 attenuated effect Effects 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 1
- 229910052753 mercury Inorganic materials 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000000825 ultraviolet detection Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J1/00—Photometry, e.g. photographic exposure meter
- G01J1/42—Photometry, e.g. photographic exposure meter using electric radiation detectors
- G01J1/429—Photometry, e.g. photographic exposure meter using electric radiation detectors applied to measurement of ultraviolet light
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Photometry And Measurement Of Optical Pulse Characteristics (AREA)
Abstract
Description
【発明の詳細な説明】
〔発明の利用分野〕
本発明は、空気やオゾンにより吸収される波長の紫外線
を簡便に測定できる紫外線モニタに関するものである。DETAILED DESCRIPTION OF THE INVENTION [Field of Application of the Invention] The present invention relates to an ultraviolet monitor that can easily measure ultraviolet rays at wavelengths that are absorbed by air and ozone.
紫外線光源は、ランプの経年変化が進むと１通常、スペ
クトルの紫外線部分ｃ４可視部より早く劣化するため、
光源が点灯していても紫外線出力が著しく減衰している
場合がある。したがって紫外線の使用に際しては、所定
の紫外線出力に対する監視を行う必要がある。しかしな
がら、真空紫外線の測定は、従来、光源およびセンサを
真空中またはＮ２などの不活性ガス中に保持した状態で
測定するため、光源を用途に応じて使用したままの状態
では紫外線モニタができないという欠点があった（特開
昭５９−１５４３２７号および特開昭５９−１６２４２
２号）。さらに紫外線検出センサには１例えばＣｓＩな
どのように、高温で使用できない光電子放出物質が使わ
れている。このため紫外線発生源の温度が高い場合には
、上記紫外線発生源とセンサとの間の距離を離すか、セ
ンサを強制冷却するしか方法がなかった。紫外線発生源
とセンサとの間の距離を離すと、空気やオゾンによる紫
外線の吸収が大きくなり測定ができなくなる。またセン
サを強制冷却すると、紫外線発生源の温度を低下させる
ことにもなり、紫外線出力そのものが変化してしまう。Ultraviolet light sources typically degrade faster in the ultraviolet part of the spectrum than in the visible part of the spectrum as the lamp ages.
Even if the light source is on, the UV output may be significantly attenuated. Therefore, when using ultraviolet light, it is necessary to monitor a predetermined ultraviolet output. However, conventionally, vacuum ultraviolet rays are measured with the light source and sensor kept in vacuum or in an inert gas such as N2, so it is not possible to monitor ultraviolet rays while the light source is used for its intended purpose. There were drawbacks (Japanese Patent Application Laid-Open No. 59-154327 and JP-A No. 59-16242)
No. 2). Further, ultraviolet detection sensors use photoelectron-emitting materials such as CsI, which cannot be used at high temperatures. For this reason, when the temperature of the ultraviolet radiation source is high, the only methods available are to increase the distance between the ultraviolet radiation source and the sensor, or to forcefully cool the sensor. If the distance between the ultraviolet radiation source and the sensor is increased, the absorption of ultraviolet rays by air and ozone will increase, making measurement impossible. Furthermore, forced cooling of the sensor also lowers the temperature of the ultraviolet radiation source, which changes the ultraviolet output itself.
本発明は、空気やオゾン、あるいは光源とセンサとの間
に存在する雰囲気ガスの影響をほとんど受けずに、簡便
な方法で紫外線の出力を検出できる紫外線モニタを得る
ことを目的とする。SUMMARY OF THE INVENTION An object of the present invention is to provide an ultraviolet monitor that can detect the output of ultraviolet rays by a simple method without being affected by air, ozone, or atmospheric gases existing between a light source and a sensor.
〔発明の概要〕
本発明による紫外線モニタは、紫外線発光部に近接する
受光面と所定の分光感度を有するセンサとの間を、紫外
線の吸収がない媒体または所望の分光透過率を有する媒
体よりなる光導路で連結したことにより、紫外線発生源
に受光面を近接させ、室温部に設けたセンサとにより、
簡便で、かなり精度がよい検出ができる紫外線モニタを
得たものである。例えば、水銀の放射線１８５ｎｍまで
測定する場合は、光導路を合成石英の窓を両端に設けた
遮光円筒の内部を、真空または不活性ガスで満たすか、
あるいは合成石英の無空棒またはガラスファイバにする
ことによって目的を達することができる。つぎに波長１
８５ｎｍの紫外線は測定せず、２５４ｎＩ１１の紫外線
出力を測定したい場合は、上記光導路を通常の石英を用
いた円筒、または無空棒、あるいはガラスファイバにす
ることによって目的が達せられる。さらにまた、例えば
１８５ｎｍと２５４ｎｍの紫外線の比を？１１１１定す
る場合には、上記光導路を２個用い、一方は１８５ｎｎ
＋の紫外線を通すものとし、他は２５４ｎｍの紫外線を
通し１８５ｎｍの紫外線を通さないものとし、上記それ
ぞれの波長に分光感度を有する２個のセンサを組合わせ
、増幅器および演算回路を使用することによって、両者
の出力比を知ることができる。[Summary of the Invention] The ultraviolet monitor according to the present invention includes a medium that does not absorb ultraviolet rays or a medium that has a desired spectral transmittance between the light receiving surface that is close to the ultraviolet light emitting part and the sensor that has a predetermined spectral sensitivity. By connecting them with an optical guide, the light-receiving surface is brought close to the ultraviolet radiation source, and the sensor installed in the room temperature area allows
This is a simple ultraviolet monitor that can detect with high accuracy. For example, when measuring mercury radiation up to 185 nm, the light guide can be filled with a vacuum or an inert gas inside a light-shielding cylinder with synthetic quartz windows on both ends.
Alternatively, the purpose can be achieved by making it a blank rod of synthetic quartz or glass fiber. Next, wavelength 1
If it is desired to measure the ultraviolet output of 254 nI11 without measuring the ultraviolet light of 85 nm, the purpose can be achieved by making the optical guide a cylinder made of ordinary quartz, a hollow rod, or a glass fiber. Furthermore, for example, what is the ratio of 185 nm and 254 nm ultraviolet rays? 1111, use two of the above optical guides, one of which is 185nn.
By combining two sensors with spectral sensitivities to each of the above wavelengths and using an amplifier and an arithmetic circuit. , the output ratio between the two can be known.
つぎに本発明の実施例を図面とともに説明する。 Next, embodiments of the present invention will be described with reference to the drawings.
第１図は本発明による紫外線モニタの第１実施例および
第２実施例を示す構成図、第２図は本発明の第３実施例
を示す構成を示す図である。第１図において１は紫外線
光源の断面を示し、合成石英ファイバよりなる光導路３
の端部受光面２を上記紫外線光源１にほぼ密着させてい
る。上記光導路３の他端は、波長１８５ｎｍに分光感度
を有するＣｓＩを光電子放出物質としたセンサ４に結合
し、該センサ４はステンレス製の遮光箱５により蔽われ
ている。上記センサ４で検出された光電流を増幅器を介
して出力表示装置（図示せず）に入力し、波長１８５ｎ
ｍの紫外線出力を読取ることができた。上記光導路３は
遮光のためにステンレスの遮光膜６で蔽った。なお、上
記光導路３の媒体が、真空、Ｎ２ガスなどの場合は、上
記光導路３の両端に合成石英の窓２をそれぞれ設けたス
テンレス製の管を用い、その内部を真空、Ｎ２ガスなど
で満たして光導路３とする。FIG. 1 is a block diagram showing the first and second embodiments of an ultraviolet monitor according to the present invention, and FIG. 2 is a block diagram showing the structure of a third embodiment of the present invention. In Fig. 1, 1 shows the cross section of the ultraviolet light source, and the optical guide 3 is made of synthetic quartz fiber.
The end light-receiving surface 2 of the ultraviolet light source 1 is brought into close contact with the ultraviolet light source 1. The other end of the optical guide 3 is coupled to a sensor 4 whose photoelectron emitting substance is CsI having spectral sensitivity at a wavelength of 185 nm, and the sensor 4 is covered by a light-shielding box 5 made of stainless steel. The photocurrent detected by the sensor 4 is input to an output display device (not shown) via an amplifier, and the wavelength is 185 nm.
I was able to read the ultraviolet light output of m. The optical guide path 3 was covered with a stainless steel light shielding film 6 for light shielding. When the medium of the optical guide 3 is a vacuum, N2 gas, etc., a stainless steel tube with synthetic quartz windows 2 provided at both ends of the optical guide 3 is used, and the inside of the tube is filled with a vacuum, N2 gas, etc. to form the optical guide path 3.
第２実施例は通常の石英ファイバをたばねたものを光導
路３の媒体として用い、波長２５４ｎｍに分光感度を有
するＣｓＩを光電子放射物質としたしセンサ４に光を導
き、検出した光電流を増幅したのち、出力表示装置によ
って波長２５４ｎｍの紫外線出力を読取ることができた
。In the second embodiment, an ordinary sprung quartz fiber is used as the medium of the optical guide path 3, CsI having spectral sensitivity at a wavelength of 254 nm is used as the photoelectron emitting material, and light is guided to the sensor 4 and the detected photocurrent is amplified. After that, it was possible to read the ultraviolet output at a wavelength of 254 nm using the output display device.
第２図に示す第３実施例は、上記第１実施例と第２実施
例との組合わせにより、それぞれの波長の紫外線強度比
を求める場合を示すもので、２本の平行した光導路３，
３′と、￥れぞれの光導路３．３′に結合したセンサ４
．４′とを備えている。The third embodiment shown in FIG. 2 shows the case where the intensity ratio of ultraviolet rays of each wavelength is determined by a combination of the first embodiment and the second embodiment. ，
3' and a sensor 4 coupled to each optical guide 3.3'.
．． 4'.
上記光導路３には第１実施例と同様に合成石英ファイバ
を媒体とし、波長１８５ｎｍに分光感度を有するＣｓｌ
を光電子放出物質としたセンサ４を使用し、光導路３′
は通常の石英ファイバを媒体とし、波長２５４ｎｍに分
光感度を有するＣｓＩを光電子放出物質とするセンサ４
′を用いた。それぞれのセンサ４および４′からの光’
ＲＷＥ、を増幅したのち、演算回路（図示せず）で両者
の比を計算し、出力表示装置によりＩ ｉ８Ｓ ／ Ｉ
２５４の紫外線強度比を読取ることができた。Similar to the first embodiment, the optical guide path 3 uses a synthetic silica fiber as a medium, and has a Csl fiber having spectral sensitivity at a wavelength of 185 nm.
is used as a photoelectron emitting material, and the optical guide 3'
The sensor 4 uses an ordinary quartz fiber as a medium and uses CsI as a photoelectron emitting material, which has spectral sensitivity at a wavelength of 254 nm.
' was used. Light from each sensor 4 and 4'
After amplifying RWE, an arithmetic circuit (not shown) calculates the ratio of the two, and an output display shows I i8S / I
254 ultraviolet light intensity ratios could be read.
また上記紫外線強度比は、光導路に１８５ｎｍおよび２
５４ｎｍの周波長の紫外線を通す媒質を用いた１本の光
導路を使用し、センサに１８５ｎｍおよび２５４ｎｍに
それぞれ分光感度を有する２種のセンサを用い、これら
センサを切替えて出力を検出し、それぞれの出力を記憶
させ演算することによって得ることもできる。In addition, the above ultraviolet light intensity ratio is 185 nm and 2
A single optical guide path using a medium that transmits ultraviolet light with a wavelength of 54 nm is used, and two types of sensors having spectral sensitivities at 185 nm and 254 nm are used, and the output is detected by switching between these sensors. It can also be obtained by storing and calculating the output of
第１表は本発明の紫外線モニタにより、紫外線強度を検
出する際の光導路の媒体とセンサの分光感度との組合わ
せの例を示したものである。Table 1 shows examples of combinations of optical guide medium and sensor spectral sensitivity when detecting ultraviolet intensity using the ultraviolet monitor of the present invention.
上記のように本発明による紫外線モニタは、紫外線発光
部に近接する受光面と所定の分光感度を有するセンサと
の間を、紫外線の吸収がない媒体または所望の分光透過
率を有する媒体よりなる光導路で連結したことにより、
光源とセンサとの距離を離しても紫外線を吸収する雰囲
気ガスの影響をほとんど受けることなく、簡便な方法に
より動作中の光源の紫外線出力を検出することができる
。As described above, the ultraviolet monitor according to the present invention provides a light guide made of a medium that does not absorb ultraviolet rays or a medium that has a desired spectral transmittance between the light receiving surface close to the ultraviolet light emitting part and the sensor having a predetermined spectral sensitivity. By connecting by road,
Even if the distance between the light source and the sensor is increased, the ultraviolet output of the operating light source can be detected by a simple method without being affected by atmospheric gas that absorbs ultraviolet rays.
第１図は本発明による紫外線モニタの第１実施例および
第２実施例を示す構成図、第２図は本発明の第３実施例
を示す構成図である。FIG. 1 is a block diagram showing a first and second embodiment of an ultraviolet monitor according to the present invention, and FIG. 2 is a block diagram showing a third embodiment of the present invention.
Claims (5)
を有するセンサとの間を、紫外線の吸収がない媒体また
は所望の分光透過率を有する媒体よりなる光導路で連結
した紫外線モニタ。(1) An ultraviolet monitor in which a light receiving surface close to an ultraviolet light emitting part and a sensor having a predetermined spectral sensitivity are connected by an optical guide made of a medium that does not absorb ultraviolet rays or a medium that has a desired spectral transmittance.
ラスのいずれかであることを特徴とする特許請求の範囲
第１項に記載した紫外線モニタ。(2) The ultraviolet monitor according to claim 1, wherein the medium is any one of a glass fiber, a glass rod, and a quartz glass.
窓を有する容器で保護されていることを特徴とする特許
請求の範囲第１項に記載した紫外線モニタ。(3) The ultraviolet monitor according to claim 1, wherein the medium is protected in a vacuum, inert gas, and in a container having a quartz glass window.
導路であって、それぞれ異った出力を検出するように、
上記各センサの分光感度とともに媒体の分光透過率を選
んだものであることを特徴とする特許請求の範囲第１項
に記載した紫外線モニタ。(4) The optical guide path is two optical guide paths coupled to two sensors, so that each detects a different output,
The ultraviolet monitor according to claim 1, wherein the spectral transmittance of the medium is selected as well as the spectral sensitivity of each of the sensors.
あって、広い分光透過率を有する媒体よりなる１本の光
導路に、それぞれ選択結合させたものであることを特徴
とする特許請求の範囲第１項に記載した紫外線モニタ。(5) The above sensor is characterized in that it is two sensors with different spectral sensitivities, each selectively coupled to a single optical guide made of a medium having a wide spectral transmittance. An ultraviolet monitor according to claim 1.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP27139085A JPS62132128A (en) | 1985-12-04 | 1985-12-04 | Ultraviolet ray monitor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP27139085A JPS62132128A (en) | 1985-12-04 | 1985-12-04 | Ultraviolet ray monitor |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62132128A true JPS62132128A (en) | 1987-06-15 |
Family
ID=17499399
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP27139085A Pending JPS62132128A (en) | 1985-12-04 | 1985-12-04 | Ultraviolet ray monitor |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62132128A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01129632U (en) * | 1988-02-19 | 1989-09-04 | ||
| JPH06147974A (en) * | 1992-11-04 | 1994-05-27 | Japan Storage Battery Co Ltd | Ultraviolet intensity sensor |
| JP2014001950A (en) * | 2012-06-15 | 2014-01-09 | Photoscience Japan Corp | Ultraviolet relay |
-
1985
- 1985-12-04 JP JP27139085A patent/JPS62132128A/en active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01129632U (en) * | 1988-02-19 | 1989-09-04 | ||
| JPH06147974A (en) * | 1992-11-04 | 1994-05-27 | Japan Storage Battery Co Ltd | Ultraviolet intensity sensor |
| JP2014001950A (en) * | 2012-06-15 | 2014-01-09 | Photoscience Japan Corp | Ultraviolet relay |
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