JPS62132019U - - Google Patents

Info

Publication number
JPS62132019U
JPS62132019U JP1683686U JP1683686U JPS62132019U JP S62132019 U JPS62132019 U JP S62132019U JP 1683686 U JP1683686 U JP 1683686U JP 1683686 U JP1683686 U JP 1683686U JP S62132019 U JPS62132019 U JP S62132019U
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JP
Japan
Prior art keywords
pair
rail
rail members
heat
block
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1683686U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1683686U priority Critical patent/JPS62132019U/ja
Publication of JPS62132019U publication Critical patent/JPS62132019U/ja
Pending legal-status Critical Current

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  • Chutes (AREA)
JP1683686U 1986-02-10 1986-02-10 Pending JPS62132019U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1683686U JPS62132019U (enrdf_load_stackoverflow) 1986-02-10 1986-02-10

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1683686U JPS62132019U (enrdf_load_stackoverflow) 1986-02-10 1986-02-10

Publications (1)

Publication Number Publication Date
JPS62132019U true JPS62132019U (enrdf_load_stackoverflow) 1987-08-20

Family

ID=30809050

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1683686U Pending JPS62132019U (enrdf_load_stackoverflow) 1986-02-10 1986-02-10

Country Status (1)

Country Link
JP (1) JPS62132019U (enrdf_load_stackoverflow)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60195996A (ja) * 1984-03-19 1985-10-04 株式会社日立製作所 半導体搬送方法及び搬送シユ−ト機構
JPS6213917B2 (enrdf_load_stackoverflow) * 1975-07-14 1987-03-30 Shuuburitsuhi Ab Sukabetsuchii

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6213917B2 (enrdf_load_stackoverflow) * 1975-07-14 1987-03-30 Shuuburitsuhi Ab Sukabetsuchii
JPS60195996A (ja) * 1984-03-19 1985-10-04 株式会社日立製作所 半導体搬送方法及び搬送シユ−ト機構

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