JPS62130321U - - Google Patents
Info
- Publication number
- JPS62130321U JPS62130321U JP1702686U JP1702686U JPS62130321U JP S62130321 U JPS62130321 U JP S62130321U JP 1702686 U JP1702686 U JP 1702686U JP 1702686 U JP1702686 U JP 1702686U JP S62130321 U JPS62130321 U JP S62130321U
- Authority
- JP
- Japan
- Prior art keywords
- opening
- region
- central opening
- hollow fibers
- humidifier
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000012510 hollow fiber Substances 0.000 claims description 5
- 238000007789 sealing Methods 0.000 claims description 2
- 239000007864 aqueous solution Substances 0.000 claims 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims 1
Landscapes
- Separation Using Semi-Permeable Membranes (AREA)
- Air Humidification (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1702686U JPS62130321U (fr) | 1986-02-07 | 1986-02-07 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1702686U JPS62130321U (fr) | 1986-02-07 | 1986-02-07 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62130321U true JPS62130321U (fr) | 1987-08-18 |
Family
ID=30809415
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1702686U Pending JPS62130321U (fr) | 1986-02-07 | 1986-02-07 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62130321U (fr) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2002037033A1 (fr) * | 2000-11-06 | 2002-05-10 | Nok Corporation | Humidificateur |
| JP2006528431A (ja) * | 2003-07-21 | 2006-12-14 | インテグリス・インコーポレーテッド | リソグラフ投影装置、パージガス供給システムおよびガスパージ |
| WO2008142866A1 (fr) * | 2007-05-21 | 2008-11-27 | Panasonic Corporation | Dispositif d'humidification et épurateur d'air avec fonction d'humidification |
| JP2009101346A (ja) * | 2007-10-03 | 2009-05-14 | Toray Ind Inc | 加湿用膜およびその製造方法 |
-
1986
- 1986-02-07 JP JP1702686U patent/JPS62130321U/ja active Pending
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2002037033A1 (fr) * | 2000-11-06 | 2002-05-10 | Nok Corporation | Humidificateur |
| JP2006528431A (ja) * | 2003-07-21 | 2006-12-14 | インテグリス・インコーポレーテッド | リソグラフ投影装置、パージガス供給システムおよびガスパージ |
| JP2008160080A (ja) * | 2003-07-21 | 2008-07-10 | Entegris Inc | リソグラフ投影装置、パージガス供給システムおよびガスパージ |
| US7879137B2 (en) | 2003-07-21 | 2011-02-01 | Entegris, Inc. | Lithographic projection apparatus, purge gas supply system and gas purging method |
| WO2008142866A1 (fr) * | 2007-05-21 | 2008-11-27 | Panasonic Corporation | Dispositif d'humidification et épurateur d'air avec fonction d'humidification |
| JPWO2008142866A1 (ja) * | 2007-05-21 | 2010-08-05 | パナソニック株式会社 | 加湿装置および加湿機能付き空気清浄機 |
| JP4698753B2 (ja) * | 2007-05-21 | 2011-06-08 | パナソニック株式会社 | 加湿装置および加湿機能付き空気清浄機 |
| JP2009101346A (ja) * | 2007-10-03 | 2009-05-14 | Toray Ind Inc | 加湿用膜およびその製造方法 |