JPS62130262U - - Google Patents
Info
- Publication number
- JPS62130262U JPS62130262U JP1651686U JP1651686U JPS62130262U JP S62130262 U JPS62130262 U JP S62130262U JP 1651686 U JP1651686 U JP 1651686U JP 1651686 U JP1651686 U JP 1651686U JP S62130262 U JPS62130262 U JP S62130262U
- Authority
- JP
- Japan
- Prior art keywords
- metal
- packing according
- thin
- rubber ring
- corrosive
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 229910052751 metal Inorganic materials 0.000 claims description 16
- 239000002184 metal Substances 0.000 claims description 16
- 238000012856 packing Methods 0.000 claims description 10
- 229920001971 elastomer Polymers 0.000 claims description 3
- 230000009972 noncorrosive effect Effects 0.000 claims 3
- 229910052782 aluminium Inorganic materials 0.000 claims 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical group [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims 1
- 229920002379 silicone rubber Polymers 0.000 claims 1
- 239000004945 silicone rubber Substances 0.000 claims 1
- 229910001220 stainless steel Inorganic materials 0.000 claims 1
- 239000010935 stainless steel Substances 0.000 claims 1
Landscapes
- Gasket Seals (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1651686U JPS62130262U (sl) | 1986-02-07 | 1986-02-07 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1651686U JPS62130262U (sl) | 1986-02-07 | 1986-02-07 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62130262U true JPS62130262U (sl) | 1987-08-17 |
Family
ID=30808441
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1651686U Pending JPS62130262U (sl) | 1986-02-07 | 1986-02-07 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62130262U (sl) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH08325734A (ja) * | 1988-01-11 | 1996-12-10 | Tadahiro Omi | 薄膜形成装置のシール機構 |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5345362A (en) * | 1976-10-06 | 1978-04-24 | Hitachi Ltd | Sealing medium for preventing gap corrosion |
| JPS54148952A (en) * | 1978-05-16 | 1979-11-21 | Toshiba Corp | Compound gasket |
-
1986
- 1986-02-07 JP JP1651686U patent/JPS62130262U/ja active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5345362A (en) * | 1976-10-06 | 1978-04-24 | Hitachi Ltd | Sealing medium for preventing gap corrosion |
| JPS54148952A (en) * | 1978-05-16 | 1979-11-21 | Toshiba Corp | Compound gasket |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH08325734A (ja) * | 1988-01-11 | 1996-12-10 | Tadahiro Omi | 薄膜形成装置のシール機構 |