JPS62129583A - Cleaning device for oil peep window of vacuum pump - Google Patents

Abstract

PURPOSE:To enable easy cleaning work for the oil peep window of a vacuum pump by providing a cleaning tool at the internal surface of the window for remote operation from the outside. CONSTITUTION:An H-type level 7 having a brush 8 rotating about an axis penetrating through an oil peep window 1 is arranged inside said peep window 1. When the lever 7 has been manually turned from the outside of a pump with the handle 9 thereof in hands, the brush 8 rotates wiping the internal surface of the transparent plate 3 of the oil peep window 1, and said window 1 is cleaned to such an extent as permitting the easy confirmation of an oil level. Furthermore, the subject cleaning device does not need any modification of a pump body and requires easy fitting work.

Description

DETAILED DESCRIPTION OF THE INVENTION [Industrial Application Field] The present invention relates to an oil-based vacuum pump used in the electronic, pharmaceutical, chemical, food, etc. sectors, and particularly to a cleaning device for its viewing window.

[Conventional technology]

FIG. 7 is a perspective view showing a general rotary pump, and 1 is an oil sight glass. Figure 8 shows this viewing window 1.
FIG. 9 is an enlarged cross-sectional view of FIG. 9 (also a front view of FIG. 8. In FIGS.
is a transparent plate made of glass or plastic, etc., 4 is a screw-type holding ring that holds down the transparent plate 3, 5 is a metal side plate of the pump body, and 6 is an oil fitted between the transparent plate 3 and the side plate 5. It is a rubber O-ring that prevents leakage.

Next, the effect will be explained. As the rotary pump shown in FIG. 7 repeatedly operates to exhaust air and gas, the oil inside the pump decreases or becomes dirty. Therefore, an oil viewing window 1 is provided for the purpose of checking the condition of this oil.

Recently, dirt in the oil inside the pumps of dry etchers, etc., especially in the semiconductor industry, has become a problem, and the dirt contained in the oil may collect on the viewing window 1, making it impossible to see the oil inside the pump. . In addition, some transparent plates 3 of the viewing window 1 are coated with Teflon to prevent dirt from adhering to them, but even with this, the dirt may make it difficult to see. 3
I had to remove it and clean it.

[Problem that the invention seeks to solve]

Conventional oil viewing windows are constructed as described above, so when oil dirt adheres to the viewing window and the oil inside the pump becomes invisible, the transparent plate 3 must be removed and cleaned, and inspection is not required. There were problems such as the work was time-consuming, oil leaked during pumping, and if the pump pumped out dangerous gases, it could have a negative impact on the human body.

B's invention was made to solve the above-mentioned problems, and the object of B's invention is to provide a device that can clean the oil sight glass without removing it when it becomes dirty.

Means for Solving Problem c] The oil sight glass cleaning device according to the present invention is equipped with a cleaning tool with a plan that is operated from the outside and moves along the inner surface of the oil sight glass.

[Effect]

The oil viewing window cleaning device of the present invention is moved by an external force to wipe and clean the viewing window.

〔Example〕

An embodiment of the present invention will be described below with reference to FIGS. 1 to 3. In the figure, numerals 2 to 6 are similar to those of the conventional example, and numeral 7 is attached to rotate around a shaft passing through the oil viewing window, and has a rubber or brush 8 for wiping the transparent plate 3. This cleaning tool consists of a lever of type 11 and has a handle part 9 on the outside. Note that 10 is an O-ring fitted inside to prevent oil from leaking outside, and is urged toward the transparent glass 3 by an outer spring 11 to seal it. 12 is a washer for holding the spring.

In such a device, when the lever 7 is rotated by hand from the outside of the pump while holding the handle 9, the rubber or brush 8 inside the pump rotates while wiping the transparent plate 3 from inside the pump, cleaning the windows and removing oil. be able to see.

In this way, the modification is simple by simply drilling a hole in the transparent plate 3 of the viewing window, and there is no need to modify the pump body.

Note that FIGS. 4 to 6 show other embodiments in which cleaning can be performed using magnetic force without making holes in the transparent plate 3, in which a brush I4 is attached around a ferromagnetic metal or magnet 13. The cleaned cleaning tool 15 is stored inside a fence line 16 installed inside the pump inside the transparent plate 3, and the cleaning tool 15 is looked into from the outside of the dominant window using a magnet 17, and is placed along the surface of the transparent plate 3. The back side of the transparent plate can be cleaned by moving the transparent plate.

Compared to the above-mentioned embodiment, method B does not require holes to be made in the aperture window, and when remodeling, the brush 14, net 16, and magnet 17 are required.
It is simpler because it only takes t6 to prepare.

[Effect of idea]

As described above, according to the present invention, the oil sight glass can be cleaned more easily than the conventional method of removing and cleaning the sight glass, and the oil can be inspected safely without getting hands dirty with oil. Moreover, it is easy to modify and install, and the device is finished at a low cost.

[Brief explanation of drawings]

FIG. 1 is a sectional view showing one embodiment of the present invention, FIG. 2 is a front view of FIG. 1, FIG. 3 is a perspective view of the 14 type lever shown in FIG. 5 is a front view of FIG. 4, FIG. 6 is a perspective view of a magnetic brush, FIG. 7 is a perspective view of a general rotary pump, and FIG. 8 is a conventional oil pump. FIG. 9 is a sectional view of the viewing window, and a front view of FIG. 9 and FIG. 8; In the figure, 2 is oil, 3 is a transparent plate, 4 is a holding ring, and 7
1 is a lever, 81 is a brush, 9 is a handle, 13 is a magnetic material, 14 is a brush, 15 is a cleaning device, 16 is an enclosure net, 17
is a magnet. Note that the same reference numerals in the figures indicate the same or corresponding parts.

Claims (3)

[Claims] (1) In a vacuum pump having an oil viewing window for checking the amount of oil contained in the vacuum pump, a cleaning tool is provided that cleans the inner surface of the viewing window by sliding it into contact with the inside surface of the viewing window when operated from the outside of the vacuum pump. A vacuum pump oil viewing window cleaning device characterized by: (2) The cleaning tool has a shaft that passes through the center of the viewing window,
2. The cleaning device for the oil sight glass of a vacuum pump according to claim 1, further comprising a substantially H-shaped lever having a window cleaning brush attached to the inside and a handle provided on the outside. (3) A cleaning device for an oil viewing window of a vacuum pump as set forth in claim 1, wherein a magnetic material having a brush attached to its surface is housed in a surrounding net installed inside the viewing window.