JPS6212949U - - Google Patents
Info
- Publication number
- JPS6212949U JPS6212949U JP10427085U JP10427085U JPS6212949U JP S6212949 U JPS6212949 U JP S6212949U JP 10427085 U JP10427085 U JP 10427085U JP 10427085 U JP10427085 U JP 10427085U JP S6212949 U JPS6212949 U JP S6212949U
- Authority
- JP
- Japan
- Prior art keywords
- stage
- observation window
- microscope
- wafer stage
- dry gas
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000523 sample Substances 0.000 claims description 5
- 238000001816 cooling Methods 0.000 claims description 2
- 239000002826 coolant Substances 0.000 claims 2
- 238000011156 evaluation Methods 0.000 claims 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 3
- 229910001873 dinitrogen Inorganic materials 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
Landscapes
- Measuring Leads Or Probes (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10427085U JPS6212949U (fr) | 1985-07-08 | 1985-07-08 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10427085U JPS6212949U (fr) | 1985-07-08 | 1985-07-08 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6212949U true JPS6212949U (fr) | 1987-01-26 |
Family
ID=30977608
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10427085U Pending JPS6212949U (fr) | 1985-07-08 | 1985-07-08 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6212949U (fr) |
-
1985
- 1985-07-08 JP JP10427085U patent/JPS6212949U/ja active Pending
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