JPS62129070U - - Google Patents

Info

Publication number
JPS62129070U
JPS62129070U JP1766086U JP1766086U JPS62129070U JP S62129070 U JPS62129070 U JP S62129070U JP 1766086 U JP1766086 U JP 1766086U JP 1766086 U JP1766086 U JP 1766086U JP S62129070 U JPS62129070 U JP S62129070U
Authority
JP
Japan
Prior art keywords
gas
substrate
vapor phase
phase growth
growth apparatus
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1766086U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1766086U priority Critical patent/JPS62129070U/ja
Publication of JPS62129070U publication Critical patent/JPS62129070U/ja
Pending legal-status Critical Current

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Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
JP1766086U 1986-02-10 1986-02-10 Pending JPS62129070U (US20020051482A1-20020502-M00012.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1766086U JPS62129070U (US20020051482A1-20020502-M00012.png) 1986-02-10 1986-02-10

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1766086U JPS62129070U (US20020051482A1-20020502-M00012.png) 1986-02-10 1986-02-10

Publications (1)

Publication Number Publication Date
JPS62129070U true JPS62129070U (US20020051482A1-20020502-M00012.png) 1987-08-15

Family

ID=30810620

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1766086U Pending JPS62129070U (US20020051482A1-20020502-M00012.png) 1986-02-10 1986-02-10

Country Status (1)

Country Link
JP (1) JPS62129070U (US20020051482A1-20020502-M00012.png)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5488071A (en) * 1977-12-26 1979-07-12 Fujitsu Ltd Vapor-phase growth method of compound semiconductor

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5488071A (en) * 1977-12-26 1979-07-12 Fujitsu Ltd Vapor-phase growth method of compound semiconductor

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