JPS62129061U - - Google Patents

Info

Publication number
JPS62129061U
JPS62129061U JP1782486U JP1782486U JPS62129061U JP S62129061 U JPS62129061 U JP S62129061U JP 1782486 U JP1782486 U JP 1782486U JP 1782486 U JP1782486 U JP 1782486U JP S62129061 U JPS62129061 U JP S62129061U
Authority
JP
Japan
Prior art keywords
reaction vessel
forming apparatus
film forming
gas
utility
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1782486U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1782486U priority Critical patent/JPS62129061U/ja
Publication of JPS62129061U publication Critical patent/JPS62129061U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Chemical Vapour Deposition (AREA)
JP1782486U 1986-02-10 1986-02-10 Pending JPS62129061U (US07847105-20101207-C00016.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1782486U JPS62129061U (US07847105-20101207-C00016.png) 1986-02-10 1986-02-10

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1782486U JPS62129061U (US07847105-20101207-C00016.png) 1986-02-10 1986-02-10

Publications (1)

Publication Number Publication Date
JPS62129061U true JPS62129061U (US07847105-20101207-C00016.png) 1987-08-15

Family

ID=30810933

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1782486U Pending JPS62129061U (US07847105-20101207-C00016.png) 1986-02-10 1986-02-10

Country Status (1)

Country Link
JP (1) JPS62129061U (US07847105-20101207-C00016.png)

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