JPS62128630U - - Google Patents

Info

Publication number

JPS62128630U

JPS62128630U JP1538586U JP1538586U JPS62128630U JP S62128630 U JPS62128630 U JP S62128630U JP 1538586 U JP1538586 U JP 1538586U JP 1538586 U JP1538586 U JP 1538586U JP S62128630 U JPS62128630 U JP S62128630U

Authority

JP

Japan

Prior art keywords

integrated circuit

thin film

amorphous carbon

carbon thin

atomic ratio

Prior art date

1986-02-05

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 229910003481 amorphous carbon Inorganic materials 0.000 claims description 4
• 239000010409 thin film Substances 0.000 claims description 4
• 238000010586 diagram Methods 0.000 description 1
• 238000001755 magnetron sputter deposition Methods 0.000 description 1
• 239000000758 substrate Substances 0.000 description 1

Cited By (1)