JPS62127654U - - Google Patents

Info

Publication number
JPS62127654U
JPS62127654U JP1542086U JP1542086U JPS62127654U JP S62127654 U JPS62127654 U JP S62127654U JP 1542086 U JP1542086 U JP 1542086U JP 1542086 U JP1542086 U JP 1542086U JP S62127654 U JPS62127654 U JP S62127654U
Authority
JP
Japan
Prior art keywords
scanning
axis
ion beam
electrode
scanning electrode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1542086U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1542086U priority Critical patent/JPS62127654U/ja
Publication of JPS62127654U publication Critical patent/JPS62127654U/ja
Pending legal-status Critical Current

Links

JP1542086U 1986-02-05 1986-02-05 Pending JPS62127654U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1542086U JPS62127654U (enrdf_load_stackoverflow) 1986-02-05 1986-02-05

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1542086U JPS62127654U (enrdf_load_stackoverflow) 1986-02-05 1986-02-05

Publications (1)

Publication Number Publication Date
JPS62127654U true JPS62127654U (enrdf_load_stackoverflow) 1987-08-13

Family

ID=30806338

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1542086U Pending JPS62127654U (enrdf_load_stackoverflow) 1986-02-05 1986-02-05

Country Status (1)

Country Link
JP (1) JPS62127654U (enrdf_load_stackoverflow)

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