JPS62126361U - - Google Patents
Info
- Publication number
- JPS62126361U JPS62126361U JP1422186U JP1422186U JPS62126361U JP S62126361 U JPS62126361 U JP S62126361U JP 1422186 U JP1422186 U JP 1422186U JP 1422186 U JP1422186 U JP 1422186U JP S62126361 U JPS62126361 U JP S62126361U
- Authority
- JP
- Japan
- Prior art keywords
- filament
- electron beam
- resistance
- evaporation device
- measuring circuit
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010438 heat treatment Methods 0.000 claims description 4
- 238000010894 electron beam technology Methods 0.000 claims description 3
- 230000008020 evaporation Effects 0.000 claims description 3
- 238000001704 evaporation Methods 0.000 claims description 3
- 238000010276 construction Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000007733 ion plating Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1422186U JPS62126361U (enExample) | 1986-02-03 | 1986-02-03 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1422186U JPS62126361U (enExample) | 1986-02-03 | 1986-02-03 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62126361U true JPS62126361U (enExample) | 1987-08-11 |
Family
ID=30804004
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1422186U Pending JPS62126361U (enExample) | 1986-02-03 | 1986-02-03 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62126361U (enExample) |
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1986
- 1986-02-03 JP JP1422186U patent/JPS62126361U/ja active Pending