JPS62124872U - - Google Patents
Info
- Publication number
- JPS62124872U JPS62124872U JP1024686U JP1024686U JPS62124872U JP S62124872 U JPS62124872 U JP S62124872U JP 1024686 U JP1024686 U JP 1024686U JP 1024686 U JP1024686 U JP 1024686U JP S62124872 U JPS62124872 U JP S62124872U
- Authority
- JP
- Japan
- Prior art keywords
- laser
- gas
- housing
- excimer
- blower
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- ZAMOUSCENKQFHK-UHFFFAOYSA-N Chlorine atom Chemical compound [Cl] ZAMOUSCENKQFHK-UHFFFAOYSA-N 0.000 claims 1
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 claims 1
- 229910052801 chlorine Inorganic materials 0.000 claims 1
- 239000000460 chlorine Substances 0.000 claims 1
- 229910052731 fluorine Inorganic materials 0.000 claims 1
- 239000011737 fluorine Substances 0.000 claims 1
Landscapes
- Lasers (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1024686U JPS62124872U (OSRAM) | 1986-01-29 | 1986-01-29 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1024686U JPS62124872U (OSRAM) | 1986-01-29 | 1986-01-29 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62124872U true JPS62124872U (OSRAM) | 1987-08-08 |
Family
ID=30796364
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1024686U Pending JPS62124872U (OSRAM) | 1986-01-29 | 1986-01-29 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62124872U (OSRAM) |
-
1986
- 1986-01-29 JP JP1024686U patent/JPS62124872U/ja active Pending
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