JPS62124754U - - Google Patents
Info
- Publication number
- JPS62124754U JPS62124754U JP1170786U JP1170786U JPS62124754U JP S62124754 U JPS62124754 U JP S62124754U JP 1170786 U JP1170786 U JP 1170786U JP 1170786 U JP1170786 U JP 1170786U JP S62124754 U JPS62124754 U JP S62124754U
- Authority
- JP
- Japan
- Prior art keywords
- ion beam
- electrode
- needle
- cleaning
- beam device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010884 ion-beam technique Methods 0.000 claims description 7
- 238000004140 cleaning Methods 0.000 claims description 4
- 238000010438 heat treatment Methods 0.000 claims description 3
- 238000000605 extraction Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 5
- 238000005485 electric heating Methods 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Electron Sources, Ion Sources (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1170786U JPS62124754U (enExample) | 1986-01-31 | 1986-01-31 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1170786U JPS62124754U (enExample) | 1986-01-31 | 1986-01-31 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62124754U true JPS62124754U (enExample) | 1987-08-07 |
Family
ID=30799165
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1170786U Pending JPS62124754U (enExample) | 1986-01-31 | 1986-01-31 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62124754U (enExample) |
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1986
- 1986-01-31 JP JP1170786U patent/JPS62124754U/ja active Pending