JPS62124753U - - Google Patents

Info

Publication number
JPS62124753U
JPS62124753U JP1170686U JP1170686U JPS62124753U JP S62124753 U JPS62124753 U JP S62124753U JP 1170686 U JP1170686 U JP 1170686U JP 1170686 U JP1170686 U JP 1170686U JP S62124753 U JPS62124753 U JP S62124753U
Authority
JP
Japan
Prior art keywords
electrode
ion beam
beam device
voltage applying
voltage
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1170686U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1170686U priority Critical patent/JPS62124753U/ja
Publication of JPS62124753U publication Critical patent/JPS62124753U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Electron Sources, Ion Sources (AREA)
JP1170686U 1986-01-31 1986-01-31 Pending JPS62124753U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1170686U JPS62124753U (enrdf_load_stackoverflow) 1986-01-31 1986-01-31

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1170686U JPS62124753U (enrdf_load_stackoverflow) 1986-01-31 1986-01-31

Publications (1)

Publication Number Publication Date
JPS62124753U true JPS62124753U (enrdf_load_stackoverflow) 1987-08-07

Family

ID=30799163

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1170686U Pending JPS62124753U (enrdf_load_stackoverflow) 1986-01-31 1986-01-31

Country Status (1)

Country Link
JP (1) JPS62124753U (enrdf_load_stackoverflow)

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