JPS62124753U - - Google Patents
Info
- Publication number
- JPS62124753U JPS62124753U JP1170686U JP1170686U JPS62124753U JP S62124753 U JPS62124753 U JP S62124753U JP 1170686 U JP1170686 U JP 1170686U JP 1170686 U JP1170686 U JP 1170686U JP S62124753 U JPS62124753 U JP S62124753U
- Authority
- JP
- Japan
- Prior art keywords
- electrode
- ion beam
- beam device
- voltage applying
- voltage
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010884 ion-beam technique Methods 0.000 claims description 6
- 238000001816 cooling Methods 0.000 claims 1
- 238000000605 extraction Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 6
Landscapes
- Electron Sources, Ion Sources (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1170686U JPS62124753U (cs) | 1986-01-31 | 1986-01-31 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1170686U JPS62124753U (cs) | 1986-01-31 | 1986-01-31 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62124753U true JPS62124753U (cs) | 1987-08-07 |
Family
ID=30799163
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1170686U Pending JPS62124753U (cs) | 1986-01-31 | 1986-01-31 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62124753U (cs) |
-
1986
- 1986-01-31 JP JP1170686U patent/JPS62124753U/ja active Pending