JPS62124430U - - Google Patents

Info

Publication number

JPS62124430U

JPS62124430U JP1254686U JP1254686U JPS62124430U JP S62124430 U JPS62124430 U JP S62124430U JP 1254686 U JP1254686 U JP 1254686U JP 1254686 U JP1254686 U JP 1254686U JP S62124430 U JPS62124430 U JP S62124430U

Authority

JP

Japan

Prior art keywords

cooling coil

local exhaust

hood

exhaust system

branch duct

Prior art date

1986-01-30

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 238000001816 cooling Methods 0.000 claims description 3
• 239000007788 liquid Substances 0.000 claims description 3
• 238000011084 recovery Methods 0.000 claims description 3
• 238000004140 cleaning Methods 0.000 claims 1
• 238000005530 etching Methods 0.000 claims 1
• 239000000498 cooling water Substances 0.000 description 2
• 238000010586 diagram Methods 0.000 description 1
• 239000002912 waste gas Substances 0.000 description 1

Cited By (1)