JPS62123649U - - Google Patents
Info
- Publication number
- JPS62123649U JPS62123649U JP1986010315U JP1031586U JPS62123649U JP S62123649 U JPS62123649 U JP S62123649U JP 1986010315 U JP1986010315 U JP 1986010315U JP 1031586 U JP1031586 U JP 1031586U JP S62123649 U JPS62123649 U JP S62123649U
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- support part
- movable
- fixed support
- support section
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000758 substrate Substances 0.000 claims description 9
- 230000002093 peripheral effect Effects 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986010315U JPH0142105Y2 (enExample) | 1986-01-29 | 1986-01-29 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986010315U JPH0142105Y2 (enExample) | 1986-01-29 | 1986-01-29 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62123649U true JPS62123649U (enExample) | 1987-08-06 |
| JPH0142105Y2 JPH0142105Y2 (enExample) | 1989-12-11 |
Family
ID=30796492
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1986010315U Expired JPH0142105Y2 (enExample) | 1986-01-29 | 1986-01-29 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0142105Y2 (enExample) |
-
1986
- 1986-01-29 JP JP1986010315U patent/JPH0142105Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0142105Y2 (enExample) | 1989-12-11 |