JPS62123649U - - Google Patents

Info

Publication number
JPS62123649U
JPS62123649U JP1986010315U JP1031586U JPS62123649U JP S62123649 U JPS62123649 U JP S62123649U JP 1986010315 U JP1986010315 U JP 1986010315U JP 1031586 U JP1031586 U JP 1031586U JP S62123649 U JPS62123649 U JP S62123649U
Authority
JP
Japan
Prior art keywords
substrate
support part
movable
fixed support
support section
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1986010315U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0142105Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1986010315U priority Critical patent/JPH0142105Y2/ja
Publication of JPS62123649U publication Critical patent/JPS62123649U/ja
Application granted granted Critical
Publication of JPH0142105Y2 publication Critical patent/JPH0142105Y2/ja
Expired legal-status Critical Current

Links

JP1986010315U 1986-01-29 1986-01-29 Expired JPH0142105Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1986010315U JPH0142105Y2 (enrdf_load_stackoverflow) 1986-01-29 1986-01-29

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986010315U JPH0142105Y2 (enrdf_load_stackoverflow) 1986-01-29 1986-01-29

Publications (2)

Publication Number Publication Date
JPS62123649U true JPS62123649U (enrdf_load_stackoverflow) 1987-08-06
JPH0142105Y2 JPH0142105Y2 (enrdf_load_stackoverflow) 1989-12-11

Family

ID=30796492

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986010315U Expired JPH0142105Y2 (enrdf_load_stackoverflow) 1986-01-29 1986-01-29

Country Status (1)

Country Link
JP (1) JPH0142105Y2 (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH0142105Y2 (enrdf_load_stackoverflow) 1989-12-11

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