JPS62122334U - - Google Patents
Info
- Publication number
- JPS62122334U JPS62122334U JP980086U JP980086U JPS62122334U JP S62122334 U JPS62122334 U JP S62122334U JP 980086 U JP980086 U JP 980086U JP 980086 U JP980086 U JP 980086U JP S62122334 U JPS62122334 U JP S62122334U
- Authority
- JP
- Japan
- Prior art keywords
- ring body
- annular rotating
- rotating body
- susceptor
- reactor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 2
- 239000000758 substrate Substances 0.000 claims description 2
- 239000000725 suspension Substances 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP980086U JPS62122334U (enExample) | 1986-01-27 | 1986-01-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP980086U JPS62122334U (enExample) | 1986-01-27 | 1986-01-27 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62122334U true JPS62122334U (enExample) | 1987-08-03 |
Family
ID=30795455
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP980086U Pending JPS62122334U (enExample) | 1986-01-27 | 1986-01-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62122334U (enExample) |
-
1986
- 1986-01-27 JP JP980086U patent/JPS62122334U/ja active Pending