JPS62121762U - - Google Patents
Info
- Publication number
- JPS62121762U JPS62121762U JP928386U JP928386U JPS62121762U JP S62121762 U JPS62121762 U JP S62121762U JP 928386 U JP928386 U JP 928386U JP 928386 U JP928386 U JP 928386U JP S62121762 U JPS62121762 U JP S62121762U
- Authority
- JP
- Japan
- Prior art keywords
- ion source
- flange
- arc chamber
- supporting
- mounting
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010884 ion-beam technique Methods 0.000 claims description 2
- 125000006850 spacer group Chemical group 0.000 claims description 2
Landscapes
- Electron Sources, Ion Sources (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP928386U JPS62121762U (cs) | 1986-01-24 | 1986-01-24 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP928386U JPS62121762U (cs) | 1986-01-24 | 1986-01-24 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62121762U true JPS62121762U (cs) | 1987-08-01 |
Family
ID=30794452
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP928386U Pending JPS62121762U (cs) | 1986-01-24 | 1986-01-24 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62121762U (cs) |
-
1986
- 1986-01-24 JP JP928386U patent/JPS62121762U/ja active Pending