JPS62120433A - Roll for cooling strip - Google Patents

Roll for cooling strip

Info

Publication number
JPS62120433A
JPS62120433A JP25859285A JP25859285A JPS62120433A JP S62120433 A JPS62120433 A JP S62120433A JP 25859285 A JP25859285 A JP 25859285A JP 25859285 A JP25859285 A JP 25859285A JP S62120433 A JPS62120433 A JP S62120433A
Authority
JP
Japan
Prior art keywords
roll
cooling roll
cooling
projections
strip
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP25859285A
Other languages
Japanese (ja)
Inventor
Keiji Tanizaki
桂二 谷崎
Ritsuo Hashimoto
律男 橋本
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Heavy Industries Ltd
Original Assignee
Mitsubishi Heavy Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Heavy Industries Ltd filed Critical Mitsubishi Heavy Industries Ltd
Priority to JP25859285A priority Critical patent/JPS62120433A/en
Publication of JPS62120433A publication Critical patent/JPS62120433A/en
Pending legal-status Critical Current

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C21METALLURGY OF IRON
    • C21DMODIFYING THE PHYSICAL STRUCTURE OF FERROUS METALS; GENERAL DEVICES FOR HEAT TREATMENT OF FERROUS OR NON-FERROUS METALS OR ALLOYS; MAKING METAL MALLEABLE, e.g. BY DECARBURISATION OR TEMPERING
    • C21D9/00Heat treatment, e.g. annealing, hardening, quenching or tempering, adapted for particular articles; Furnaces therefor
    • C21D9/52Heat treatment, e.g. annealing, hardening, quenching or tempering, adapted for particular articles; Furnaces therefor for wires; for strips ; for rods of unlimited length
    • C21D9/54Furnaces for treating strips or wire
    • C21D9/56Continuous furnaces for strip or wire
    • C21D9/573Continuous furnaces for strip or wire with cooling
    • C21D9/5735Details
    • C21D9/5737Rolls; Drums; Roll arrangements

Abstract

PURPOSE:To stabilize the quality of a strip wound around a cooling roll and cooled by feeding a refrigerant to the inside of the roll by arranging many polygonal projections on the whole peripheral surface of the roll at regular intervals so as to reduce a temp. difference in the roll. CONSTITUTION:Many projections 11 are arranged on the whole peripheral surface of a cooling roll 10 so that the tops of the projections 11 from a cylindrical roll surface as a whole. The projections 11 may by hexagonal blocks and are attached to the roll 10 with bolts 12 through packing 13. The projections 11 are arranged at regular intervals (d) of width S. A refrigerant W is fed to the inside of the resulting cooling roll 10 to cool a strip wound around the roll.

Description

【発明の詳細な説明】 〈産業上の利用分野〉 本発明は、薄板鋼帯等の帯状体を、焼鈍等の熱処理する
際に、該帯状体の冷却手段として用いられる冷却ロール
に関する。
DETAILED DESCRIPTION OF THE INVENTION <Industrial Application Field> The present invention relates to a cooling roll used as a means for cooling a strip such as a thin steel strip when the strip is subjected to heat treatment such as annealing.

〈従来の技術〉 連続焼鈍設備等の熱処理ラインにおける熱鋼帯の冷却手
段としては、ガスジェット冷却。
<Prior art> Gas jet cooling is used as a means of cooling hot steel strips in heat treatment lines such as continuous annealing equipment.

熱水冷却、気水冷却、ロール冷却等の多種多様な方式が
採用されているが、その内でも特にロール冷却方式は冷
却速度の面で効率が良いものである。
A wide variety of methods have been adopted, such as hot water cooling, air-water cooling, and roll cooling, but among these, the roll cooling method is particularly efficient in terms of cooling speed.

連続焼鈍設備の冷却帯に用いられている従来のロール冷
却装置を、第12〜第14図に基づいて説明する。この
装置は、幾つかの冷却ロール1を有し、該冷却11−ル
1に巻付けられて通板されろ鋼帯(以丁スl−IJツブ
と称す)9を冷却するものである9、冷却11−ル1は
中空で内部に冷媒としての水Wが通されており、該冷却
ロール1の周面に接触するストリップ9を冷却する。尚
、冷却ロール1の近傍にはガスジェット装置2が設けら
れており、ストリップ9の背面からガスジェットを吹付
け、該ストリップ9を冷却ロール1に押付けて冷却効率
を向上させている。また、冷却ロール1内の水面位置は
冷却ロール1の軸線より少し上方となるl:う設定され
ており、冷却ロールIの回転により内部の水が攪拌され
て冷却効率が向上するようになっている。
A conventional roll cooling device used in a cooling zone of continuous annealing equipment will be explained based on FIGS. 12 to 14. This device has several cooling rolls 1, and is used to cool a filtered steel strip (referred to as an IJ roll) 9 that is wound around the cooling rolls 1 and passed through. The cooling roll 1 is hollow, and water W as a refrigerant is passed through the cooling roll 1 to cool the strip 9 in contact with the circumferential surface of the cooling roll 1. A gas jet device 2 is provided near the cooling roll 1, and blows a gas jet from the back side of the strip 9 to press the strip 9 against the cooling roll 1 to improve cooling efficiency. In addition, the water surface position inside the cooling roll 1 is set slightly above the axis of the cooling roll 1, so that the rotation of the cooling roll I stirs the water inside and improves the cooling efficiency. There is.

〈発明が解決しようとする問題点〉 ス1−リップ9は冷却ロール1の周面全域に常に接触し
ている由ではなく、冷却ロール1の周面の成る範囲が順
次ストリップつと接触すると共に、第15図に示すよう
に、冷却ロール1の軸方向の中央部は高温のストリップ
9と接触する加熱部となり、その両端部はストリップ9
と接触しない非加熱部となっている。
<Problems to be Solved by the Invention> The slip 1-lip 9 does not always contact the entire circumferential surface of the cooling roll 1, but the area of the circumferential surface of the cooling roll 1 sequentially contacts the strip, and As shown in FIG. 15, the central part of the cooling roll 1 in the axial direction becomes a heating part that comes into contact with the high temperature strip 9, and the both ends thereof
This is a non-heating part that does not come into contact with the

このように、冷却ロール1の周面軸方向でストリップ9
により加熱される加熱部と加熱されない非加熱部とが形
成されてしまうことから下記のような問題点が生じてい
た。
In this way, the strip 9 is formed in the circumferential axial direction of the cooling roll 1.
The following problems have arisen because a heating section that is heated and a non-heating section that is not heated are formed.

すなわち、ストリップ9と接触している冷却ロール1の
加熱部は、そのロール半径方向に第15図中に付記した
如きの温度分布となっているが、非加熱部と異なる温度
状態となっていることから次の問題点が生ずる。
That is, the heated part of the cooling roll 1 that is in contact with the strip 9 has a temperature distribution in the radial direction of the roll as shown in FIG. 15, but the temperature is different from that of the non-heated part. This gives rise to the following problem.

■ 非加熱部におけろ冷却ロール胴の平均温度はほぼ水
温度(T、)とみなすことができるが、この1度(T、
)と加熱部における冷却ロール胴の平均温度(T、)と
の温度差(%、 > T、 )が大きいことから、冷却
ロール1に第16図に示すようなヒートクラウン(δ)
が生じてしまう。このIこめ、冷却ロール1の周面とス
I・リップ9の側端部との間に隙間が生じ、ストリップ
9に温度むらができて品質が低下し、製品歩留りが悪く
なる。
■ The average temperature of the cooling roll cylinder in the non-heating section can be considered to be approximately the water temperature (T,);
) and the average temperature (T, ) of the cooling roll body in the heating section (%, > T, ) is large, so the cooling roll 1 has a heat crown (δ) as shown in FIG.
will occur. As a result, a gap is created between the circumferential surface of the cooling roll 1 and the side edge of the slip slip 9, causing temperature unevenness in the strip 9, resulting in a decrease in quality and poor product yield.

■ 加熱部におけろ冷却ロールの胴表面温度(r3)と
胴内面温度(T2)との温度差(T3〉T2)が大きい
ことから、バイメタル効果により第17図に示すように
冷却ロール1の胴に局部的な曲げ変形(δ2)が生じて
しまう。このため、上記■と同様にストリップ9に温度
むらができて製品歩留りが悪くなる。
■ Since the temperature difference (T3>T2) between the body surface temperature (r3) and the body inner surface temperature (T2) of the cooling roll in the heating section is large, the temperature of the cooling roll 1 increases due to the bimetallic effect as shown in Fig. 17. Local bending deformation (δ2) occurs in the trunk. For this reason, as in the case (2) above, temperature unevenness occurs in the strip 9, resulting in poor product yield.

■ 加熱部のおける冷却ロールの胴表面温度(T3)と
胴内面温度(T2)との温度差が大きいため、冷却ロー
ル1の胴表面に圧縮応力が生じる。このため冷却ロール
1の周面の降伏、割れ等が生じて寿命が短かくなってし
まう。
(2) Since the temperature difference between the body surface temperature (T3) and the body inner surface temperature (T2) of the cooling roll in the heating section is large, compressive stress is generated on the body surface of the cooling roll 1. As a result, yielding, cracking, etc. occur on the circumferential surface of the cooling roll 1, resulting in a shortened lifespan.

本発明は上記従来の事情に鑑みなされたもので、上記問
題点を合理的に解決する冷却ロールを提供することを目
的とする。
The present invention was made in view of the above-mentioned conventional circumstances, and an object of the present invention is to provide a cooling roll that rationally solves the above-mentioned problems.

く問題点を解決するための手段〉 本発明に係る帯状体の冷却ロールは、内部に冷媒を通す
ことにより周面に巻付けられた帯状体を冷却する冷却ロ
ールにおいて、前記周面全域に互いに隙間をもって配し
た多数の多角形突起を設けたことを特徴とする。
Means for Solving the Problems> The cooling roll for a strip according to the present invention cools the strip wrapped around the circumferential surface by passing a refrigerant through the inside of the cooling roll. It is characterized by having a large number of polygonal protrusions arranged with gaps between them.

く作   用〉 高温の帯状体と冷却ロールの胴周面との間に突起が介在
することにより冷却ロールの加熱部と非加熱部との温度
差及び冷却ロールの胴表面と胴内面との温度差が小さく
なり、冷却ロールの熱変形が防止される。そしてこのと
き、突起の熱膨張は隙間により吸収されろ。
Due to the presence of protrusions between the high-temperature strip and the circumferential surface of the cooling roll, the temperature difference between the heated and non-heated parts of the cooling roll and the temperature between the surface and inner surface of the cooling roll are reduced. The difference becomes smaller and thermal deformation of the cooling roll is prevented. At this time, the thermal expansion of the protrusion will be absorbed by the gap.

く実 施 例〉 先に説明したロール冷却装置に適用した本発明の一実施
例を図面に基づいて説明する。
Embodiment An embodiment of the present invention applied to the roll cooling device described above will be described based on the drawings.

第1図〜第3図は本発明の一実施例を表す図面である。1 to 3 are drawings showing one embodiment of the present invention.

図示のように本実施例の冷却ロール10はその周面全域
(胴部表面)に多数の突起11が設けられており、これ
ら突起11の先端面で全体として円周状のロール表面を
呈している。尚、この冷却ロール10は従来の冷却ロー
ル1に較べて突起11の高さh分だけ肉厚が薄く設定さ
れている。
As shown in the figure, the cooling roll 10 of this embodiment is provided with a large number of protrusions 11 over its entire circumferential surface (body surface), and the end surface of these protrusions 11 presents a circumferential roll surface as a whole. There is. The thickness of this cooling roll 10 is set to be thinner than that of the conventional cooling roll 1 by the height h of the projections 11.

突起11の個々は多角形状(本実施例では六角形状)の
ブロックであり、ボルト12で冷却ロール10に取付け
られている。尚、13また、上記突起11は隣接する他
の突起11との間に輻Sの隙間dをもって配されており
、突起11の先端角部lieは第3図に詳示するように
面取りして丸みをもたせ、巻付けられるストリップ9の
損傷を防止しである。
Each of the projections 11 is a polygonal (hexagonal in this embodiment) block, and is attached to the cooling roll 10 with bolts 12. 13 Furthermore, the protrusion 11 is arranged with a gap d of radius S between it and other protrusions 11 adjacent to each other, and the tip corner lie of the protrusion 11 is chamfered as shown in detail in FIG. This is done to prevent damage to the strip 9 being wound.

上記構成の冷却ロール100作用を従来の冷却ロール1
との比較において説明する。本発明に係る冷却ロール1
0の加熱部と従来の冷却ロール1の加熱部とでは、第4
図に示すように温度分布に差異が生ずる。すなわち、従
来に対して本実施例では、ヒー)・クラウンの要因とな
る冷却ロールの胴平均屋度が−からT′へ低下すると共
に、曲げ変形や表面応力の要因となる冷却ロールの胴表
面温度がT3からT′へ低下している。
The effect of the cooling roll 100 having the above configuration is similar to that of the conventional cooling roll 1.
This will be explained in comparison with. Cooling roll 1 according to the present invention
0 heating section and the heating section of the conventional cooling roll 1, the fourth
As shown in the figure, a difference occurs in the temperature distribution. That is, in this embodiment, compared to the conventional method, the average temperature of the cooling roll's body, which is a cause of heat crown, is reduced from - to T', and the temperature of the body surface of the cooling roll, which is a cause of bending deformation and surface stress, is reduced from - to T'. The temperature has decreased from T3 to T'.

コ(7)結果、従来δ、Lx、R(T、−T、)であっ
たヒー)・クラウン量が、本実施例では冷却ロール10
の胴部側でδ、′(X:R(T、、’ −T、) 、突
起11側でδ□’ och (T、、−T、l となっ
て合計(δ、′十と、′]となる。すなわち、R>>h
(ここに、Rは冷却ロール10の径、hは突起11の高
さ)であるので、δ、′)δ、′とみなせることから、
(T、−11> (T、’−T)となって本実施例のピ
ー1−クラウン量は従来のヒートクラウン量δ1.上り
小ざくなっている。
(7) As a result, the amount of crown (heat) and crown, which was conventionally δ, Lx, R(T, -T,), is
On the body side, δ,′(X:R(T,,′ −T,), and on the protrusion 11 side, δ□′och(T,,−T,l, and the total is (δ,′10,′ ], that is, R>>h
(Here, R is the diameter of the cooling roll 10, and h is the height of the protrusion 11.) Therefore, it can be regarded as δ, ′) δ, ′.
(T, -11>(T,'-T), and the P1-crown amount of this embodiment is smaller than the conventional heat crown amount δ1.

また、従来δ2oC(T、−T2)であ−)た曲げ変形
量が、本実施例では冷却ロール10の胴部側でδ2’ 
oc (T3’ −T2) 、突起11側でδ2” o
c (T、−T、、′)となる。しか(7ながら、突起
11の変形量δ′は隙間dにより吸収されることからほ
ぼ零とみなせるため、従来の曲げ変形量と本実施例の曲
げ変形量とけ(T、−T、)>(T、、’−″[′21
 となって本実施例では曲げ変形量が小さくなっている
Further, in this embodiment, the amount of bending deformation, which was conventionally δ2oC(T, -T2), is δ2' on the body side of the cooling roll 10.
oc (T3' - T2), δ2'' o on the protrusion 11 side
c (T, -T,,'). However, since the amount of deformation δ' of the protrusion 11 is absorbed by the gap d, it can be regarded as almost zero. T,,'-''['21
Therefore, in this embodiment, the amount of bending deformation is small.

また、従来σoc (T、−T2)であった表面応力が
、本実施例では冷却ロール10の胴部側でσ′戊(T3
’−T2) 、突起11側でど■(T、−T、’ )と
なる。すなわち、(T:、−T2) > (T、’−T
、)X(L−T3′)から本実施例の表面応力は従来よ
り小さくなっている。
In addition, the surface stress that was conventionally σoc (T, -T2) is changed to σ' (T3) on the body side of the cooling roll 10 in this embodiment.
'-T2), and on the protrusion 11 side, it becomes (T, -T,'). That is, (T:, -T2) >(T,'-T
, )X(L-T3'), the surface stress of this embodiment is smaller than that of the conventional one.

第5図〜第8図は本発明の他の一実施例を表す図面であ
る。尚、上記実施例を同一部分には同一符号を付して異
なる部分のみ説明する。
FIGS. 5 to 8 are drawings showing another embodiment of the present invention. In the above embodiment, the same parts are given the same reference numerals and only the different parts will be explained.

図示のように本実施例の冷却ロール10は四角形状の突
起11を成すブロックをロール10の周面に設けられた
溝15に嵌込むことに、より取付けている。溝15は冷
却四−ル10の軸方向に多数条形成されており、突起1
1を成すブロックは冷却ロール10の一端から1g15
に嵌合させて順次他端側へスライドさせることにより隙
間dをもって多数取付けられている。そして、冷却ロー
ル10の端部には押えブロックlfaが溶接されており
、この押えブロックllaにより溝15に嵌合した突起
11を固定している。
As shown in the figure, the cooling roll 10 of this embodiment is attached by fitting blocks forming square projections 11 into grooves 15 provided on the circumferential surface of the roll 10. A large number of grooves 15 are formed in the axial direction of the cooling wheel 10, and the grooves 15 are
1 block is 1g15 from one end of the cooling roll 10
A large number of them are attached with a gap d between them by fitting them together and sliding them one after another toward the other end. A presser block lfa is welded to the end of the cooling roll 10, and the protrusion 11 fitted in the groove 15 is fixed by the presser block lla.

本実施例の冷却ロール10にあっても上記実施例と同様
に、ヒートクラウン、曲げ変形及び表面応力を実用上無
視し得ろ程度に低減させることができる。
In the cooling roll 10 of this embodiment, heat crown, bending deformation, and surface stress can be reduced to such an extent that they can be practically ignored, as in the above embodiments.

第9図〜第11図は本発明の更に他の一実施例を表す図
面である。尚、前述の実施例と同一部分には同一符号を
付して異なる部分のみ説明する。
FIGS. 9 to 11 are drawings showing still another embodiment of the present invention. Incidentally, the same parts as those in the previous embodiment are given the same reference numerals, and only the different parts will be explained.

図示のように本実施例の冷却ロール10は胴部の表面に
多数条の溝16を形成することにより相対的に多数の突
起11を形成したものである。従って、冷却ロール10
の軸方向と周方向とにそれぞれ延在し且つ互いに交わる
溝16の設定態様により、突起11の大きさ、その形状
等が定まる。そして、1416は幅Sをもっており、こ
れら溝16自体が突起11間に設けられろ隙間dとなっ
ている。また、;滓16の底部16aは応力渠中を防t
hするため丸みをもたせて加工しである。
As shown in the figure, the cooling roll 10 of this embodiment has a relatively large number of protrusions 11 formed by forming a large number of grooves 16 on the surface of the body. Therefore, the cooling roll 10
The size, shape, etc. of the protrusion 11 are determined by the manner in which the grooves 16 extend in the axial direction and the circumferential direction and intersect with each other. 1416 has a width S, and these grooves 16 themselves are provided between the protrusions 11 to form a gap d. In addition, the bottom part 16a of the slag 16 prevents stress in the ditch.
It has been processed to give it a rounded shape.

本実施例の冷却ロール10にあっても前述の実施例と同
様に、ヒートクラウン、曲げ変形及び表面応力を実用上
無視し得ろ程度に低減させろことができろ。
In the cooling roll 10 of this embodiment, heat crown, bending deformation, and surface stress can be reduced to such an extent that they can be practically ignored, as in the previous embodiment.

〈発明の効果〉 本発明によれば冷却ロールに生ずる温度差を低減するこ
とができ、ビートクラウンや曲げ変形を実用上無視し得
る程度に低減させてストリップの品質安定化及び歩留り
向上を実現することができると共に、表面応力も実用上
無視し得る程度に低減させて冷却ロールの寿命を延ばす
ことができろ。
<Effects of the Invention> According to the present invention, it is possible to reduce the temperature difference occurring in the cooling roll, and to reduce beat crown and bending deformation to a practically negligible extent, thereby realizing stabilization of strip quality and improvement of yield. At the same time, the life of the cooling roll can be extended by reducing the surface stress to a practically negligible level.

【図面の簡単な説明】[Brief explanation of drawings]

第1図〜第3図は本発明の一実施例に係り、第1図は冷
却ロールの一部を表す縦断面図、第2図は冷却ロールの
周面の一部を表す平面図、第3図は第1図中のA部の拡
大図、第4図は本発明の作用を従来との比較において説
明する温度分布図、第5図〜第8図は本発明の他の一実
施例に係り、第5図は冷却ロールの一部を表す縦断面図
、第6図は冷却ロールの一部を表す横断面図、第7図は
突起の斜視図、第8図は第6図中のB部の拡大図、第9
図〜第11図は本発明の更に他の一実施例に係り、第9
図は冷却ロールの一部を表す縦断面図、第10図は冷却
ロールの一部を表す横断面図、第11図は第10図中の
(”部の拡大図、第12図は従来のロール冷却装置の斜
視図、第13図は従来の冷却ロールの縦断面図、第14
図は従来の冷却ロールの横断面図、第15図は冷却ロー
ルの温度分布図、第16図、第17図はそれぞれ従来の
不A合を説明する概念図である。 図  面  中、 9はストリップ、 10は冷却ロール、 11は突起、 dはW、間である。 特  許  出  願 人 三菱重工業株式会社 復  代  理  人
1 to 3 relate to one embodiment of the present invention, in which FIG. 1 is a longitudinal sectional view showing a part of the cooling roll, FIG. 2 is a plan view showing a part of the circumferential surface of the cooling roll, and FIG. Fig. 3 is an enlarged view of part A in Fig. 1, Fig. 4 is a temperature distribution diagram illustrating the effect of the present invention in comparison with the conventional one, and Figs. 5 to 8 are other embodiments of the present invention. 5 is a vertical sectional view showing a part of the cooling roll, FIG. 6 is a cross sectional view showing a part of the cooling roll, FIG. 7 is a perspective view of the protrusion, and FIG. Enlarged view of part B, No. 9
9 to 11 relate to still another embodiment of the present invention, and FIG.
The figure is a vertical sectional view showing a part of the cooling roll, Fig. 10 is a cross-sectional view showing a part of the cooling roll, Fig. 11 is an enlarged view of the section ('' in Fig. 10, and Fig. 12 is a conventional A perspective view of a roll cooling device, FIG. 13 is a longitudinal sectional view of a conventional cooling roll, and FIG. 14 is a perspective view of a roll cooling device.
The figure is a cross-sectional view of a conventional cooling roll, FIG. 15 is a temperature distribution diagram of the cooling roll, and FIGS. 16 and 17 are conceptual diagrams explaining conventional failures. In the drawings, 9 is a strip, 10 is a cooling roll, 11 is a protrusion, and d is W. Patent applicant: Mitsubishi Heavy Industries, Ltd., acting agent

Claims (1)

【特許請求の範囲】[Claims] 内部に冷媒を通すことにより周面に巻付けられた帯状体
を冷却する冷却ロールにおいて、前記周面全域に互いに
隙間をもって配した多数の多角形突起を設けたことを特
徴とする帯状体の冷却ロール。
A cooling roll for cooling a strip wrapped around the circumferential surface by passing a refrigerant through the inside, characterized in that a large number of polygonal protrusions arranged with gaps between each other are provided over the entire circumferential surface. roll.
JP25859285A 1985-11-20 1985-11-20 Roll for cooling strip Pending JPS62120433A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP25859285A JPS62120433A (en) 1985-11-20 1985-11-20 Roll for cooling strip

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP25859285A JPS62120433A (en) 1985-11-20 1985-11-20 Roll for cooling strip

Publications (1)

Publication Number Publication Date
JPS62120433A true JPS62120433A (en) 1987-06-01

Family

ID=17322400

Family Applications (1)

Application Number Title Priority Date Filing Date
JP25859285A Pending JPS62120433A (en) 1985-11-20 1985-11-20 Roll for cooling strip

Country Status (1)

Country Link
JP (1) JPS62120433A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20100272901A1 (en) * 2007-12-05 2010-10-28 Yasuharu Shinokawa Thin film forming apparatus and thin film forming method

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20100272901A1 (en) * 2007-12-05 2010-10-28 Yasuharu Shinokawa Thin film forming apparatus and thin film forming method

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