JPS62120353U - - Google Patents
Info
- Publication number
- JPS62120353U JPS62120353U JP802486U JP802486U JPS62120353U JP S62120353 U JPS62120353 U JP S62120353U JP 802486 U JP802486 U JP 802486U JP 802486 U JP802486 U JP 802486U JP S62120353 U JPS62120353 U JP S62120353U
- Authority
- JP
- Japan
- Prior art keywords
- rails
- cassette
- boat
- semiconductor substrates
- slider
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 7
- 239000000758 substrate Substances 0.000 claims description 7
- 238000001125 extrusion Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP802486U JPS62120353U (enExample) | 1986-01-21 | 1986-01-21 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP802486U JPS62120353U (enExample) | 1986-01-21 | 1986-01-21 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62120353U true JPS62120353U (enExample) | 1987-07-30 |
Family
ID=30792026
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP802486U Pending JPS62120353U (enExample) | 1986-01-21 | 1986-01-21 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62120353U (enExample) |
-
1986
- 1986-01-21 JP JP802486U patent/JPS62120353U/ja active Pending
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