JPS62120341U - - Google Patents

Info

Publication number
JPS62120341U
JPS62120341U JP670286U JP670286U JPS62120341U JP S62120341 U JPS62120341 U JP S62120341U JP 670286 U JP670286 U JP 670286U JP 670286 U JP670286 U JP 670286U JP S62120341 U JPS62120341 U JP S62120341U
Authority
JP
Japan
Prior art keywords
chuck
semiconductor wafer
saucer
tank
processing apparatus
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP670286U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP670286U priority Critical patent/JPS62120341U/ja
Publication of JPS62120341U publication Critical patent/JPS62120341U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Coating Apparatus (AREA)
  • Weting (AREA)
JP670286U 1986-01-21 1986-01-21 Pending JPS62120341U (US06168776-20010102-C00041.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP670286U JPS62120341U (US06168776-20010102-C00041.png) 1986-01-21 1986-01-21

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP670286U JPS62120341U (US06168776-20010102-C00041.png) 1986-01-21 1986-01-21

Publications (1)

Publication Number Publication Date
JPS62120341U true JPS62120341U (US06168776-20010102-C00041.png) 1987-07-30

Family

ID=30789463

Family Applications (1)

Application Number Title Priority Date Filing Date
JP670286U Pending JPS62120341U (US06168776-20010102-C00041.png) 1986-01-21 1986-01-21

Country Status (1)

Country Link
JP (1) JPS62120341U (US06168776-20010102-C00041.png)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH11128813A (ja) * 1997-10-31 1999-05-18 Tokyo Electron Ltd 塗布処理方法および塗布処理装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH11128813A (ja) * 1997-10-31 1999-05-18 Tokyo Electron Ltd 塗布処理方法および塗布処理装置

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