JPS62120340U - - Google Patents
Info
- Publication number
- JPS62120340U JPS62120340U JP747186U JP747186U JPS62120340U JP S62120340 U JPS62120340 U JP S62120340U JP 747186 U JP747186 U JP 747186U JP 747186 U JP747186 U JP 747186U JP S62120340 U JPS62120340 U JP S62120340U
- Authority
- JP
- Japan
- Prior art keywords
- wafers
- rows
- supporting
- furnace core
- core tube
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986007471U JPH0510352Y2 (https=) | 1986-01-21 | 1986-01-21 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986007471U JPH0510352Y2 (https=) | 1986-01-21 | 1986-01-21 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62120340U true JPS62120340U (https=) | 1987-07-30 |
| JPH0510352Y2 JPH0510352Y2 (https=) | 1993-03-15 |
Family
ID=30790952
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1986007471U Expired - Lifetime JPH0510352Y2 (https=) | 1986-01-21 | 1986-01-21 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0510352Y2 (https=) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS49114347A (https=) * | 1973-02-28 | 1974-10-31 | ||
| JPS57167625A (en) * | 1980-11-24 | 1982-10-15 | Ee Esu Kiyuu Bootsu Inc | Quartz boat for machining semiconductor wafer |
-
1986
- 1986-01-21 JP JP1986007471U patent/JPH0510352Y2/ja not_active Expired - Lifetime
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS49114347A (https=) * | 1973-02-28 | 1974-10-31 | ||
| JPS57167625A (en) * | 1980-11-24 | 1982-10-15 | Ee Esu Kiyuu Bootsu Inc | Quartz boat for machining semiconductor wafer |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0510352Y2 (https=) | 1993-03-15 |