JPS62119843A - Rotation anode x-ray generation device - Google Patents

Abstract

PURPOSE:To obtain the high speed rotation of the captioned rotation anode, by providing, injection and ejection passages for injecting and ejecting a coolant into a cooling passage provided in the rotation anode, in the direction where the inflow pressure hardly interfere the rotation of said anode. CONSTITUTION:In case of the captioned device, electron beams 15 are irradiated from an electron gun 8 to a rotation anode 1 with a coolant passage 10, and the generated X-ray therein is radiated through a transmission window 9. Besides, a coolant injection passage 22 and an ejection passage 23 intercommunicated to the coolant passage 10, are provided to a housing 21 supporting the rotation anode 1. In this case, the injection passage 22 is provided in the approximately tangential direction reversely to the rotating direction of the anode 1, while the ejection passage 23 is provided in the approximately tangential direction identically to the rotating direction thereof. Therefore, the inflow pressure of the coolant 17 is hardly allowed to interfere the rotation of the anode 1, thereby the coolant 17 is injected and ejected with no resistance so that it is possible to improve the performance of the captioned device in order that the coolant 17 is preferably contributed to obtain the high speed rotation of the anode 1.

Description

[Detailed Description of the Invention] [Summary] In a rotating anode X-ray generator, in which a coolant is injected into and discharged from a cooling path provided inside the rotating anode, the coolant injection path is provided in a housing that supports the rotating anode. The coolant flow smoothly flows into the rotating anode without interfering with the rotation of the rotating anode, and the coolant that has passed through the anode white cooling path is smoothly sent to the coolant discharge path. This achieves higher performance of the device.

[Industrial application field]

The present invention relates to an improvement in a rotating anode X-ray generating device, and more particularly to a device having a rotating anode with internal coolant passages.

In patterning technology for high-density integrated circuits, pattern transfer using soft X-rays in the wavelength range of several to several tens of people has high resolution due to extremely small diffraction and scattering features, and is a fine and precise transfer method. The electron beam impact type is currently being used as the most practical X-ray generator. Among these, the electron beam bombardment type using a rotating anode has the advantage of increasing the incident electron beam power and increasing the X-ray output by increasing the anode cooling effect by increasing the anode rotation speed.

[Conventional technology]

Figure 2 shows a side sectional view (A) showing the main parts of a prior art electron beam impact type X-ray transfer device and its AA sectional view (I).
]) and a BB sectional view (c).

In FIG. 2, 1 is a rotating anode made of metal, 2 is a rotating shaft of the rotating anode 1, 3 is a vacuum chamber housing the rotating anode 1, and 4 is a rotating anode made of metal.
5 is a housing that supports the rotating anode 1; 5 is a bearing that supports the rotating shaft 2; 6 is a vacuum seal that hermetically seals the gap between the vacuum chamber 3 and the housing 4; 7 is a coolant seal; 8 is an electron gun; is an X-ray transparent window, and a coolant flow passage 10 that communicates the inside of the rotating anode 1 and the rotating shaft 2 has one end opening facing an annular groove 11 provided in the housing 4, and the other end opening facing the annular groove 11 provided in the housing 4. The opening faces the annular groove 12 provided in the opening.

A coolant injection path 13 formed in the housing 4 communicates with the groove 11, and a coolant discharge path 14 formed in the housing 4 communicates with the groove 12.

In such a device, the coolant 1 is supplied through the coolant injection path 13.
7 is injected into the coolant flow path 10, the vacuum chamber 3 is brought to a predetermined degree of vacuum, the rotating shaft 2 is rotated at a predetermined speed, and the slope of the rotating anode 1 is irradiated with an electron beam 15 emitted from the electron gun 8. do. Then, the rotating anode 1 emits X-rays 16 at the part irradiated by the electron beam 15, and a part of the X-rays 16 is transmitted through the X-ray transmission window 9, and is transmitted through the sample chamber (Fig. (not shown).

[Problem that the invention seeks to solve]

In the above-mentioned conventional apparatus, the rotation speed of the rotating anode 10 affects the cooling efficiency of the anode, and high-speed rotation is desired. Therefore, instead of the conventional ball bearing, an air bearing has been used as the bearing 5.

On the other hand, the conventional coolant injection path 13 and coolant discharge path 14
was formed in the radial direction of the rotating shaft 2, as shown in FIG. 2 (II+) and (71).

Therefore, the pressure of the coolant 17 injected from the injection path 13 is
The problem is that the coolant 17 that acts to apply a brake to the rotating shaft 2 and is also sent from the flow path 10 to the discharge path 14 acts as a resistance that prevents the rotation of the rotating shaft 2, thereby impairing the rotational speed of the rotating shaft 2. [Means for solving the problem] Figure 1 is a side cross-sectional view (A) showing the main parts of an electron beam impact type X-ray transfer device according to an embodiment of the present invention, and its C -C sectional view (b) and DD sectional view (c).

In FIG. 1, in which the same reference numerals are used for common parts as in FIG. .

The above problem can be solved by irradiating the rotating anode with an electron beam, as shown in Figure 1. In a rotary anode X-ray generator that generates FA, a housing 21 that supports the rotary anode 1 that is folded inside the cooling passage 10 communicates with the cooling passage 10 in a substantially tangential direction opposite to the rotational direction of the rotary anode 1 . An injection path 22 for injecting 17 and a cooling path 1 that communicates almost tangentially to the direction of rotation of the rotating anode 1
This problem is solved by a rotating anode X-ray generator characterized in that it is provided with a discharge passage 23 for discharging the coolant 17 from the rotary anode X-ray generator.

[Effect]

According to the above means, the injection pressure of the coolant acts in the direction of rotation of the rotating shaft, allowing the coolant to flow into the rotating anode without interfering with the rotation of the rotating shaft, reducing fluid resistance and opening the cooling path. Since the fluid resistance that forces the coolant to pass through and be discharged into the discharge passage is reduced, the rotating shaft can use the same power source as the conventional one and achieve higher speed than the conventional one.

〔Example〕

An embodiment of the present invention will be described below with reference to FIG.

In FIG. 1, a housing 21, which corresponds to the conventional housing 4, has a vacuum chamber 3 attached to its left end, and a bearing 5. A groove 24 corresponding to the conventional groove 11, a groove 25 corresponding to the conventional groove 12, and a coolant injection passage 22 corresponding to the conventional coolant injection passage 13, which accommodate the vacuum seal 6, the coolant seal 7, etc. and,
A coolant discharge passage 23 corresponding to the conventional coolant discharge passage 14 is provided.

However, the inclination of the coolant injection path 22 that is inclined in the tangential direction of the rotating shaft 2 (groove 24) is the direction in which the coolant injection pressure acts in the rotational direction of the rotating shaft 2, that is, as shown in FIG. 1 (Ll). When the rotating shaft 2 rotates to the right as shown in FIG. 23 is the direction in which the outflowing coolant flows with low resistance, that is, when the rotating shaft 2 is rotating clockwise as shown in FIG. 1 (c),
The coolant discharge path 23 formed above the rotating shaft 2 has an upward slope to the right.

Such a device includes a coolant injection path 22 and a coolant discharge path 2.
3, and while rotating the rotating shaft 2,
When the rotating anode 1 is irradiated with an electron beam 15 emitted from the electron gun 8, the rotating anode 1 emits X-rays 16.

〔Effect of the invention〕

As explained above, according to the present invention, the inflow pressure of the coolant does not interfere with the rotation of the rotating shaft, the coolant flows into the rotating anode with low resistance, and the coolant flowing out from the rotating shaft has low resistance. Since the coolant flows out, the coolant contributes to increasing the speed of the rotating shaft, which has the effect of improving the performance of the rotating anode X-ray generator.

[Brief explanation of drawings]

FIG. 1 is a side sectional view (A) showing the main parts of an electron beam impact type X-ray transfer device according to an embodiment of the present invention, and its CC sectional view (II) and D-D sectional view (C). , Figure 2 is a side sectional view (A) showing the main parts of a conventional electron beam impact type X-ray transfer device and its A-A sectional view (0).
and BB sectional view (c). In the figure, 1 is a rotating anode, 15 is an electron beam, 16 is an X-ray, 10 is a cooling path, 21 is a housing, 17 is a coolant, 22 is a coolant injection path, and 23 is a coolant discharge path.

Claims (1)

[Claims] In a rotating anode X-ray generator that generates X-rays by irradiating a rotating anode with an electron beam, the housing (21) supports the rotating anode (1) and has a cooling path (10) therein. an injection path (22) that communicates in a substantially tangential direction opposite to the rotation direction of the rotating anode (1) and injects the coolant (17) into the cooling path (10); A rotating anode X-ray generator characterized in that a discharge passage (23) is provided which communicates in substantially the same tangential direction as the direction and discharges the coolant (17) from the cooling passage (10).