JPS62119607U - - Google Patents

Info

Publication number
JPS62119607U
JPS62119607U JP762186U JP762186U JPS62119607U JP S62119607 U JPS62119607 U JP S62119607U JP 762186 U JP762186 U JP 762186U JP 762186 U JP762186 U JP 762186U JP S62119607 U JPS62119607 U JP S62119607U
Authority
JP
Japan
Prior art keywords
measured
markers
positions
movement
measuring
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP762186U
Other languages
Japanese (ja)
Other versions
JPH0522814Y2 (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1986007621U priority Critical patent/JPH0522814Y2/ja
Publication of JPS62119607U publication Critical patent/JPS62119607U/ja
Application granted granted Critical
Publication of JPH0522814Y2 publication Critical patent/JPH0522814Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Description

【図面の簡単な説明】[Brief explanation of the drawing]

第１図は本考案の一実施例の概略を示す斜視図
、第２図は本考案の校正板の一実施例を示す部分
図、第３図は校正板を使つた補正の方法を説明す
るための図である。 １２…Ｘ軸リニアスケール、１３…Ｙ軸リニア
スケール、１５…演算装置、１７…校正板、４１
…照準装置。 Fig. 1 is a perspective view schematically showing an embodiment of the present invention, Fig. 2 is a partial view showing an embodiment of the calibration plate of the present invention, and Fig. 3 explains a correction method using the calibration plate. This is a diagram for 12... X-axis linear scale, 13... Y-axis linear scale, 15... Arithmetic device, 17... Calibration plate, 41
...Aiming device.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] Ｘ―ＹテーブルのＸ方向の移動量を測定するＸ
軸リニアスケールおよびＹ方向の移動量を測定す
るＹ軸リニアスケールと、被測定物を載せた前記
Ｘ―Ｙテーブルの移動位置を決める照準装置と、
位置を指示する複数のマーカが設けられこのマー
カの位置が正確に知られている校正板と、この校
正板を前記Ｘ―Ｙテーブルに載せ前記複数のマー
カの位置を前記２つのリニアスケールによつて測
定して得られた複数の測定値およびあらかじめ知
られている前記マーカの位置を示す複数の正確な
値とから、被測定物を測定する際にその測定値の
補正を行う演算装置とを備えたことを特徴とする
寸法測定装置。 X to measure the amount of movement of the X-Y table in the X direction
an axis linear scale, a Y-axis linear scale that measures the amount of movement in the Y direction, and an aiming device that determines the movement position of the XY table on which the object to be measured is placed;
A calibration plate is provided with a plurality of markers for indicating positions and the positions of the markers are accurately known, and the calibration plate is placed on the XY table and the positions of the plurality of markers are determined by the two linear scales. a calculation device that corrects the measured value when measuring the object to be measured from a plurality of measured values obtained by measuring the object and a plurality of accurate values indicating the position of the marker known in advance; A dimension measuring device characterized by comprising:
JP1986007621U 1986-01-21 1986-01-21 Expired - Lifetime JPH0522814Y2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1986007621U JPH0522814Y2 (en) 1986-01-21 1986-01-21

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986007621U JPH0522814Y2 (en) 1986-01-21 1986-01-21

Publications (2)

Publication Number Publication Date
JPS62119607U true JPS62119607U (en) 1987-07-29
JPH0522814Y2 JPH0522814Y2 (en) 1993-06-11

Family

ID=30791244

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986007621U Expired - Lifetime JPH0522814Y2 (en) 1986-01-21 1986-01-21

Country Status (1)

Country Link
JP (1) JPH0522814Y2 (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005164611A (en) * 2000-03-27 2005-06-23 Palm Microlaser Technologies Ag Control system of method and device for operating biological or non-biological object
JP2015112671A (en) * 2013-12-11 2015-06-22 松本　清 Processing apparatus
WO2020129850A1 (en) * 2018-12-21 2020-06-25 オムロン株式会社 Method for correcting values detected by linear scales
US11709050B2 (en) 2019-10-28 2023-07-25 Omron Corporation Position measurement method using a calibration plate to correct a detection value from the position detector

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5779509A (en) * 1980-11-04 1982-05-18 Mutoh Ind Ltd Coordinate reading and plotting device

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5779509A (en) * 1980-11-04 1982-05-18 Mutoh Ind Ltd Coordinate reading and plotting device

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005164611A (en) * 2000-03-27 2005-06-23 Palm Microlaser Technologies Ag Control system of method and device for operating biological or non-biological object
JP2015112671A (en) * 2013-12-11 2015-06-22 松本　清 Processing apparatus
WO2020129850A1 (en) * 2018-12-21 2020-06-25 オムロン株式会社 Method for correcting values detected by linear scales
JPWO2020129850A1 (en) * 2018-12-21 2021-11-04 オムロン株式会社 How to correct the detected value of the linear scale
US11333535B2 (en) 2018-12-21 2022-05-17 Omron Corporation Method for correcting values detected by linear scales
US11709050B2 (en) 2019-10-28 2023-07-25 Omron Corporation Position measurement method using a calibration plate to correct a detection value from the position detector

Also Published As

Publication number Publication date
JPH0522814Y2 (en) 1993-06-11

Similar Documents

Publication Publication Date Title
JPS62119607U (en)
US6205673B1 (en) Fractional-decimal vernier
US4660295A (en) Metric measuring device for postage stamps
JP3554590B2 (en) Scribing ruler
CN212931462U (en) Calibration and detection device for inner and outer square
JP3047684U (en) Structure of groove measuring probe for dial gauge or digital indicator
JP3009689U (en) Steel pipe welding appearance inspection jig
JPS61243312A (en) Measurement of area
JPS6123762Y2 (en)
JPH0731123Y2 (en) Deflection measuring device for concrete specimen
JPS6038164Y2 (en) Simple pipe outer diameter measuring device
JPH0649918U (en) Steel pipe weld size measuring instrument
KR100482040B1 (en) Centre point measurement supporting device for nut welded on body
JPH0413606Y2 (en)
JPS6217688Y2 (en)
JPS6311130U (en)
JPH0623926Y2 (en) Marking rod
JPH01176904A (en) Flatness measuring instrument
JPS61174606U (en)
JPH0175846U (en)
JPH033545Y2 (en)
JPS6114515A (en) Leveling rod for measuring level
JPH0267202U (en)
JPS6160115U (en)
JPH029804U (en)