JPS62119074U - - Google Patents
Info
- Publication number
- JPS62119074U JPS62119074U JP603986U JP603986U JPS62119074U JP S62119074 U JPS62119074 U JP S62119074U JP 603986 U JP603986 U JP 603986U JP 603986 U JP603986 U JP 603986U JP S62119074 U JPS62119074 U JP S62119074U
- Authority
- JP
- Japan
- Prior art keywords
- light receiving
- shield case
- light
- remote control
- receiving surface
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004020 conductor Substances 0.000 claims 1
- 239000012528 membrane Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 3
- 238000002834 transmittance Methods 0.000 description 1
Landscapes
- Shielding Devices Or Components To Electric Or Magnetic Fields (AREA)
- Non-Insulated Conductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP603986U JPS62119074U (cs) | 1986-01-20 | 1986-01-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP603986U JPS62119074U (cs) | 1986-01-20 | 1986-01-20 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62119074U true JPS62119074U (cs) | 1987-07-28 |
Family
ID=30788179
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP603986U Pending JPS62119074U (cs) | 1986-01-20 | 1986-01-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62119074U (cs) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2021134879A (ja) * | 2020-02-28 | 2021-09-13 | 株式会社フジキン | ガスボックス、ガスボックスシステムおよび半導体製造装置 |
-
1986
- 1986-01-20 JP JP603986U patent/JPS62119074U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2021134879A (ja) * | 2020-02-28 | 2021-09-13 | 株式会社フジキン | ガスボックス、ガスボックスシステムおよび半導体製造装置 |