JPS62118627A - Piezoelectric resonator - Google Patents

Piezoelectric resonator

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Publication number
JPS62118627A
JPS62118627A JP26072185A JP26072185A JPS62118627A JP S62118627 A JPS62118627 A JP S62118627A JP 26072185 A JP26072185 A JP 26072185A JP 26072185 A JP26072185 A JP 26072185A JP S62118627 A JPS62118627 A JP S62118627A
Authority
JP
Japan
Prior art keywords
piezoelectric substrate
piezoelectric
electrode
resonator
piezoelectric resonator
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP26072185A
Other languages
Japanese (ja)
Inventor
Jiro Inoue
二郎 井上
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Murata Manufacturing Co Ltd
Original Assignee
Murata Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Murata Manufacturing Co Ltd filed Critical Murata Manufacturing Co Ltd
Priority to JP26072185A priority Critical patent/JPS62118627A/en
Priority to US06/893,937 priority patent/US4760358A/en
Publication of JPS62118627A publication Critical patent/JPS62118627A/en
Pending legal-status Critical Current

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  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)

Abstract

PURPOSE:To decrease the static capacitance and to improve the spurious characteristic by forming at least one electrode in a shape cancelling a surface electric charge of opposite polarity produced at the peripheral part and in a diagonal direction of the major surface of a piezoelectric substrate in the two-terminal type piezoelectric resonator formed with the electrode to both the major surfaces opposed to each other on the piezoelectric substrate. CONSTITUTION:In the piezoelectric resonator 11, a rectangle ring part 12 having a prescribed width formed to the peripheral part of the major surface 7a of the piezoelectric substrate 7 and an electrode 15 comprising crossing diagonal line parts 13, 14 prolonged from the ring part 12 in directions of diagonal lines l1, l2 of the piezoelectric substrate 7 are formed. Thus, the opposed area between both the opposed electrodes is decreased, the surface electric charges of the opposite polarities due to the undesired vibration mode generated at the peripheral part of the major surface of the piezoelectric substrate and in diagonal line directions are cancelled, the static capacitance is decreased and the piezoelectric resonator with excellent spurious characteristic is obtained.

Description

【発明の詳細な説明】 (産業上の利用分野) 本発明はラダーフィルタや発振子等に使用されろ2端子
形の圧電共振子に関する。
DETAILED DESCRIPTION OF THE INVENTION (Field of Industrial Application) The present invention relates to a two-terminal piezoelectric resonator used in ladder filters, oscillators, and the like.

(従来技術) −IIGIこ一うゲーフIルタは、塩3図に示すように
、入力端子1.2と出力端子3.4との間に、直列共振
子5と並列共振子6とを、いわゆる梯子(ラダー)状に
接続した構成を有している。上記直列共振子5および並
列共振子〇は、いずれも、2端子形の圧電共振子である
(Prior art) - As shown in Figure 3, the IIGI gate filter has a series resonator 5 and a parallel resonator 6 between the input terminal 1.2 and the output terminal 3.4. It has a so-called ladder-like connected structure. The series resonator 5 and the parallel resonator 〇 are both two-terminal piezoelectric resonators.

ところで、上記のようなラダーフィルタにおいて、形状
の小形化を図るためには、直列共振子5および並列共振
子6の使用個数をできるだけ少なくシ、かつ、必要なフ
ィルタ特性が得られるようにすることが好ましい。この
ように、直列共振子5および並列共振子6の使用個数を
少なくして、必要なフィルタ特性を得るようにするには
、直列共振子5と並列共振子6の静電容量の比を大きく
とり、これにより生ずるフィルタ特性のシェーブファク
タの悪化は、直列共振子5および並列共振子6として、
機械的Q(Qm)の大きなものを使用すればよい。上記
のように、直列共振子5と並列共振子6との静電容量比
を大きくするには、直列共振子5を構成している圧電基
板の誘電率を小さく、厚みを厚くする一方、並列共振子
6を構成している圧電基板の誘電率を大きく、厚みを薄
くする必要がある。しかしながら、直列共振子5の圧電
基板の厚みを厚くするとフィルタの形状が大きくなり、
また、並列共振子6の圧電基板の厚みを薄くすると、こ
の圧電基板の機械的な強度が低くなる。
By the way, in order to reduce the size of the ladder filter as described above, it is necessary to use as few series resonators 5 and parallel resonators 6 as possible, and to obtain the necessary filter characteristics. is preferred. In this way, in order to reduce the number of series resonators 5 and parallel resonators 6 used and obtain the necessary filter characteristics, the ratio of the capacitances of the series resonators 5 and parallel resonators 6 should be increased. The deterioration of the shave factor of the filter characteristics caused by this is caused by the series resonator 5 and the parallel resonator 6.
A material with a large mechanical Q (Qm) may be used. As mentioned above, in order to increase the capacitance ratio between the series resonator 5 and the parallel resonator 6, the dielectric constant and thickness of the piezoelectric substrate constituting the series resonator 5 must be made small, and the thickness must be increased, while the parallel It is necessary to increase the dielectric constant and reduce the thickness of the piezoelectric substrate constituting the resonator 6. However, if the thickness of the piezoelectric substrate of the series resonator 5 is increased, the shape of the filter becomes larger.
Furthermore, when the thickness of the piezoelectric substrate of the parallel resonator 6 is reduced, the mechanical strength of this piezoelectric substrate is reduced.

そこで、直列共振子5は、従来、第4図(a)、第4図
(b)および第4図(C)に示すように、四角形状の圧
電基板7の対向する両主表面7 a、 7 bに夫々形
成される電極8および9のうち、主表面7aに形成され
た片方の電極8の寸法を小さくして電極8.9間の対向
面積を小さくすることにより、静電容量を小さくするよ
うにしていた。
Therefore, as shown in FIGS. 4(a), 4(b), and 4(C), the series resonator 5 conventionally has two opposing main surfaces 7a, Of the electrodes 8 and 9 formed on the main surface 7a, the dimensions of one of the electrodes 8 and 9 formed on the main surface 7a are reduced to reduce the opposing area between the electrodes 8 and 9, thereby reducing the capacitance. I was trying to do that.

しかしながら、上記のように、直列共振子5の電極8の
寸法を小さくすると、共振周波数の1.5倍、3倍、5
倍および7倍の周波数帯域におけるスプリアス特性が劣
化し、このような直列共振子5を使用したラダーフィル
タでは、通過周波数帯域外でのスプリアスが大きくなる
といった問題があった。
However, as mentioned above, if the dimensions of the electrode 8 of the series resonator 5 are reduced, the resonant frequency will be 1.5 times, 3 times, and 5 times
A ladder filter using such a series resonator 5 has a problem in that the spurious characteristics in the double and seven times frequency bands are degraded, and the spurious outside the pass frequency band becomes large.

(発明の目的) 本発明の目的は、静電容量が小さく、しかも、スプリア
ス特性が良好な圧電共振子を提供することを目的として
いる。
(Object of the Invention) An object of the present invention is to provide a piezoelectric resonator that has small capacitance and good spurious characteristics.

(発明の構成) このため、本発明は、四角形状の圧電基板の対向する両
主表面に夫々形成された電極の少なくとも一方は、それ
が形成された圧電基板の主表面の周縁部に形成されたリ
ング状部と、このリング状部から上記主表面の対角線方
向に伸長して形成された対角線状部とからなることを特
徴としている。
(Structure of the Invention) Therefore, the present invention provides that at least one of the electrodes formed on both opposing main surfaces of a rectangular piezoelectric substrate is formed on the peripheral edge of the main surface of the piezoelectric substrate on which the electrode is formed. It is characterized by comprising a ring-shaped part and a diagonal part extending from the ring-shaped part in a diagonal direction of the main surface.

すなわち、本発明は、圧電基板の対向する両主表面に夫
々電極が形成された2端子形の圧電共振子において、少
なくとも一方の電極が圧電基板の主表面の周縁部および
対角線方向に生じる異極性の表面電荷を相殺するような
形状となるようにしたものである。
That is, the present invention provides a two-terminal piezoelectric resonator in which electrodes are formed on both opposing main surfaces of a piezoelectric substrate, in which at least one electrode has different polarity that occurs at the periphery and diagonal direction of the main surface of the piezoelectric substrate. The shape is such that it cancels out the surface charge.

本発明のかかる特徴は、本願の発明者による次の考察に
基づいて得られたものである。
These characteristics of the present invention were obtained based on the following considerations by the inventor of the present application.

本願の発明者は、先ず、第4図(a)、第4図(b)お
よび第4図(C)の構成を有する直列共振子5の圧電基
板7と同一の圧電材料を使用し、圧電基板7とほぼ同一
の寸法を有する、4.9mm角、厚さ0、.5mmの圧
電基板(図示せず。)を製作し、その両主表面に夫々全
面電極を形成して、この圧電基板のインピーダンス特性
を測定したところ、第5図に示す結果を得た。
The inventor of the present application first used the same piezoelectric material as the piezoelectric substrate 7 of the series resonator 5 having the configurations shown in FIGS. 4(a), 4(b), and 4(C), and It has almost the same dimensions as the substrate 7, 4.9 mm square, thickness 0, . A 5 mm piezoelectric substrate (not shown) was manufactured, electrodes were formed on both main surfaces thereof, and the impedance characteristics of this piezoelectric substrate were measured, and the results shown in FIG. 5 were obtained.

一方、コンピュータの発達により、最近、実用化されつ
つある有限要素法解析を用いて上記圧電基板のモデルに
ついて、シュミレーション計算により、インピーダンス
特性を求めたところ、第5図に示すものと良い一致が見
られた。
On the other hand, with the development of computers, the impedance characteristics of the piezoelectric substrate model described above were determined through simulation calculations using finite element method analysis, which has recently been put into practical use, and a good agreement with that shown in Figure 5 was found. It was done.

そこで、コンピュータによる有限要素法解析により、上
記圧電基板のモデルについて、変位および歪みに対応し
てその表面に発生する表面電荷分布を求めたところ、第
5図のインピーダンス特性において、基本振動a1それ
に対するスプリアスbないしQに夫々対応して、第6図
(a)ないし、(J2)に示すような表面電荷分布を得
た。ここで、第5図を見れば明らかなように、スプリア
スc、g、hおよびiは励起しにくいモードであるので
、以下の議論からは除外することにして、第6図(b)
 、 (d) 。
Therefore, by computer-assisted finite element analysis, we determined the surface charge distribution generated on the surface of the piezoelectric substrate model in response to displacement and strain. In the impedance characteristics shown in Figure 5, we found that the fundamental vibration a1 Surface charge distributions as shown in FIGS. 6(a) to (J2) were obtained corresponding to spurious signals b to Q, respectively. Here, as is clear from Fig. 5, spurious c, g, h, and i are modes that are difficult to excite, so they will be excluded from the following discussion, and Fig. 6 (b)
, (d).

(e)、(D、(D、(k)および(12)の表面電荷
分布のパターンを見れば明らかなように、スプリアスb
、d、e。
As is clear from the surface charge distribution patterns of (e), (D, (D, (k) and (12)), the spurious b
,d,e.

「、j、におよびρに対応する圧電基板の表面電荷の分
布は、圧電基板の主表面の周縁と対角線方向とに符号の
異なる電荷が分布していることがわかる。
It can be seen that the surface charge distribution of the piezoelectric substrate corresponding to ,j, and ρ has charges with different signs distributed along the periphery and diagonal direction of the main surface of the piezoelectric substrate.

ところで、圧電基板のある不要振動モード、すなわち、
スプリアスを抑圧するためには、その振動モードにおい
て圧電基板表面に発生する表面電荷がちょうど相殺され
るような電極形状とすればよいことが知られている。
By the way, there is a certain unnecessary vibration mode of the piezoelectric substrate, namely,
It is known that in order to suppress spurious components, the electrode shape should be such that the surface charges generated on the surface of the piezoelectric substrate in the vibration mode are exactly canceled out.

従って、上記シュミレーションの結果と上記事実とから
、圧電基板の主表面と対角線方向とに電極が形成されて
いれば、スプリアス振動に対応して圧電基板表面の表面
電荷が相殺され、スプリアス振動が抑圧されるものと考
えられる。これに対し、第4図(a)、第4図(b)お
よび第4図(c)のように、四角形状の電極8を有する
直列共振子5において、電極8の寸法を小さくすると、
圧電基板5の一つの主表面上で相殺される電荷量が正負
アンバランスになる。したがって、このような電極構成
を有する直列共振子を使用したラダーフィルタではスプ
リアス特性が劣化することが理解される。
Therefore, from the above simulation results and the above facts, if electrodes are formed diagonally to the main surface of the piezoelectric substrate, the surface charge on the piezoelectric substrate surface will be canceled out in response to spurious vibrations, and spurious vibrations will be suppressed. It is considered that On the other hand, if the dimensions of the electrode 8 are made smaller in the series resonator 5 having the rectangular electrode 8 as shown in FIGS. 4(a), 4(b), and 4(c),
The amount of charges canceled out on one main surface of the piezoelectric substrate 5 becomes unbalanced between positive and negative. Therefore, it is understood that spurious characteristics deteriorate in a ladder filter using a series resonator having such an electrode configuration.

本発明は、このような考察に基づいてなされたものであ
る。
The present invention has been made based on such consideration.

(発明の効果) 本発明によれば、2端子形の圧電共振子の少なくとも一
方の電極は、それが形成された圧電基板の主表面の周縁
部および対角線方向に形成するようにしたので、対向す
る両電極間の対向面積が小さくなり、かつ、圧電基板の
主表面の周縁部および対角線方向に発生する不要振動モ
ードによる異極性の表面電荷が相殺され、静電容量が小
さく、しかも、スプリアス特性の良好な圧電共振子を得
ることができる。
(Effects of the Invention) According to the present invention, at least one electrode of a two-terminal piezoelectric resonator is formed along the peripheral edge and diagonal direction of the main surface of the piezoelectric substrate on which it is formed, so that The opposing area between the two electrodes is reduced, and the surface charges of different polarities due to unnecessary vibration modes generated at the periphery and diagonal of the main surface of the piezoelectric substrate are canceled out, resulting in a small capacitance and improved spurious characteristics. A good piezoelectric resonator can be obtained.

(実施例) 以下、添付図面を参照して本発明の詳細な説明する。(Example) Hereinafter, the present invention will be described in detail with reference to the accompanying drawings.

第1図(a)、第1図(b)および第1図(C)に本発
明に係る圧電共振子の一実施例を示す。
FIG. 1(a), FIG. 1(b) and FIG. 1(C) show an embodiment of a piezoelectric resonator according to the present invention.

上記圧電共振子IIは、第4図(a)、第4図(b)お
よび第4図(C)において説明した直列共振子5におい
て、寸法の小さい四角形状の電極8に代えて、圧電基板
7の主表面7aの周縁部に形成された所定幅を有する四
角形状のリング状部12と、このリング状部12から圧
電基板7の対角線g1およびQ、の方向に伸長する十字
状の対角線部13および14とからなる電極15を形成
するようにしたものである。
The piezoelectric resonator II has a piezoelectric substrate instead of the small rectangular electrode 8 in the series resonator 5 explained in FIG. 4(a), FIG. 4(b), and FIG. 4(C). a square ring-shaped part 12 having a predetermined width formed on the peripheral edge of the main surface 7a of the piezoelectric substrate 7; and a cross-shaped diagonal part extending from the ring-shaped part 12 in the direction of the diagonal lines g1 and Q of the piezoelectric substrate 7. 13 and 14, an electrode 15 is formed.

なお、第1図(a)、第1図(b)および第1図(c)
において、第4図(a)、第4図(b)および第4図(
C)に対応する部分には対応する符号を付して示し、重
複した説明は省略する。
In addition, Fig. 1(a), Fig. 1(b) and Fig. 1(c)
In Fig. 4(a), Fig. 4(b) and Fig. 4(
Parts corresponding to C) are shown with corresponding symbols, and redundant explanations will be omitted.

このような構成であれば、上記圧電共振子11は、第5
図に示すスプリアスd、e、f、j、におよびgに対応
する圧電基板7の主表面7aにおける表面電荷が電極1
5の対角線部13および14により相段される。これに
より、スプリアスd、ej、j、におよびQを抑圧する
ことができる。また、電極15のリング状部12の存在
により、スプリアスb、eおよびrが抑圧される。一方
、電極15は、圧電基板7の主表面7aの一部に形成さ
れるので、電極15と電極9との対向面積が小さくなり
、圧電共振子11の静電容量も小さくなり、ラダーフィ
ルタの直列共振子として好適に使用することができる。
With such a configuration, the piezoelectric resonator 11 has the fifth
The surface charges on the main surface 7a of the piezoelectric substrate 7 corresponding to the spurious waves d, e, f, j, and g shown in the figure are
5 by diagonal portions 13 and 14. Thereby, spurious d, ej, j, and Q can be suppressed. Further, due to the presence of the ring-shaped portion 12 of the electrode 15, spurious components b, e, and r are suppressed. On the other hand, since the electrode 15 is formed on a part of the main surface 7a of the piezoelectric substrate 7, the opposing area between the electrode 15 and the electrode 9 becomes small, the capacitance of the piezoelectric resonator 11 becomes small, and the ladder filter It can be suitably used as a series resonator.

上記実施例において、電極15は、たとえば第2図に示
すように、対角線状部13および14のうち、いずれか
一方を省略したものであってもよい。また、上記電極1
5は部分的に幅が異なっていたり、凹部や凸部を有して
いてもよい。さらに、圧電基板7は、平行四辺形状のも
のであってもよい。
In the above embodiment, the electrode 15 may have one of the diagonal portions 13 and 14 omitted, as shown in FIG. 2, for example. In addition, the above electrode 1
5 may have partially different widths or may have recesses or protrusions. Furthermore, the piezoelectric substrate 7 may have a parallelogram shape.

本発明はラダーフィルタに使用される圧電共振子の他に
、発振子等にも適用することができる。
The present invention can be applied not only to piezoelectric resonators used in ladder filters but also to oscillators and the like.

【図面の簡単な説明】[Brief explanation of drawings]

第1図(a)および第1図(b)は夫々本発明に係る圧
電共振子の一実施例の平面図および底面図、竺1 回(
−)IJ 竺1 1’i’71/ −)/T’l NT
   nT 灼1− ;八A KCFF+ M第2図は
上記実施例の変形例の平面図、第3図はラダーフィルタ
の回路図、 第4図(a)および第4図(b)は夫々従来の圧電共振
子の平面図および底面図、 第4図(c)は第4図(a)の■−■線に沿う断面図、
第5図は従来の圧電共振子の圧電基板のインピーダンス
特性図、 第6図(a)ないしく12)は夫々圧電基板の主表面に
発生する表面電荷パターンの説明図である。 5・・・直列共振子、  6・・・並列共振子、7・・
・圧電基板、 7 a、 7 b・・・主表面、9・・
・電極、   11・・・圧電共振子、12・・・リン
グ状部、13.14・・・対角線状部、I5・・・電極
、g、、12.・・・対角線。
FIG. 1(a) and FIG. 1(b) are a plan view and a bottom view of an embodiment of a piezoelectric resonator according to the present invention, respectively.
-)IJ 纺1 1'i'71/ -)/T'l NT
nT 灼1-; 8A KCFF+M Fig. 2 is a plan view of a modification of the above embodiment, Fig. 3 is a circuit diagram of a ladder filter, Fig. 4(a) and Fig. 4(b) are respectively the conventional A top view and a bottom view of the piezoelectric resonator, FIG. 4(c) is a sectional view taken along the line ■-■ in FIG. 4(a),
FIG. 5 is an impedance characteristic diagram of a piezoelectric substrate of a conventional piezoelectric resonator, and FIGS. 6(a) to 12) are explanatory diagrams of surface charge patterns generated on the main surface of the piezoelectric substrate, respectively. 5...Series resonator, 6...Parallel resonator, 7...
・Piezoelectric substrate, 7 a, 7 b...Main surface, 9...
- Electrode, 11... Piezoelectric resonator, 12... Ring-shaped part, 13.14... Diagonal part, I5... Electrode, g, , 12. ···diagonal.

Claims (1)

【特許請求の範囲】[Claims] (1)四角形状の圧電基板の対向する両主表面に夫々電
極が形成されてなる圧電共振子において、上記電極の少
なくとも一方は、それが形成された圧電基板の主表面の
周縁部に形成された所定幅を有する四角形状のリング状
部と、このリング状部から上記主表面の対角線方向に伸
長して形成された対角線状部、とからなり、不要振動モ
ードにより圧電基板の上記主表面に発生する異極性の表
面電荷が相殺されるようにしたことを特徴とする圧電共
振子。
(1) In a piezoelectric resonator in which electrodes are formed on both opposing main surfaces of a square piezoelectric substrate, at least one of the electrodes is formed on the periphery of the main surface of the piezoelectric substrate on which it is formed. The main surface of the piezoelectric substrate is made of A piezoelectric resonator characterized in that generated surface charges of different polarities cancel each other out.
JP26072185A 1985-08-07 1985-11-19 Piezoelectric resonator Pending JPS62118627A (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP26072185A JPS62118627A (en) 1985-11-19 1985-11-19 Piezoelectric resonator
US06/893,937 US4760358A (en) 1985-08-07 1986-08-06 Piezoelectric element

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP26072185A JPS62118627A (en) 1985-11-19 1985-11-19 Piezoelectric resonator

Publications (1)

Publication Number Publication Date
JPS62118627A true JPS62118627A (en) 1987-05-30

Family

ID=17351834

Family Applications (1)

Application Number Title Priority Date Filing Date
JP26072185A Pending JPS62118627A (en) 1985-08-07 1985-11-19 Piezoelectric resonator

Country Status (1)

Country Link
JP (1) JPS62118627A (en)

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2007032444A1 (en) * 2005-09-15 2007-03-22 Daishinku Corporation Crystal unit

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JPS5127736U (en) * 1974-08-21 1976-02-28
JPS52132690A (en) * 1976-04-28 1977-11-07 Nec Corp Partial electrode type piezoelectric porcelain vibrator

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5127736U (en) * 1974-08-21 1976-02-28
JPS52132690A (en) * 1976-04-28 1977-11-07 Nec Corp Partial electrode type piezoelectric porcelain vibrator

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2007032444A1 (en) * 2005-09-15 2007-03-22 Daishinku Corporation Crystal unit
US7902721B2 (en) 2005-09-15 2011-03-08 Daishinku Corporation Crystal resonator
JP5040654B2 (en) * 2005-09-15 2012-10-03 株式会社大真空 Crystal oscillator

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