JPS62118442U - - Google Patents
Info
- Publication number
- JPS62118442U JPS62118442U JP668186U JP668186U JPS62118442U JP S62118442 U JPS62118442 U JP S62118442U JP 668186 U JP668186 U JP 668186U JP 668186 U JP668186 U JP 668186U JP S62118442 U JPS62118442 U JP S62118442U
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor pellet
- pattern
- inspection jig
- image
- mirrors
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000008188 pellet Substances 0.000 claims description 7
- 239000004065 semiconductor Substances 0.000 claims description 7
- 238000007689 inspection Methods 0.000 claims 1
- 238000011179 visual inspection Methods 0.000 description 2
- 239000011521 glass Substances 0.000 description 1
- 238000005286 illumination Methods 0.000 description 1
Landscapes
- Length Measuring Devices By Optical Means (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP668186U JPS62118442U (de) | 1986-01-20 | 1986-01-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP668186U JPS62118442U (de) | 1986-01-20 | 1986-01-20 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62118442U true JPS62118442U (de) | 1987-07-28 |
Family
ID=30789421
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP668186U Pending JPS62118442U (de) | 1986-01-20 | 1986-01-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62118442U (de) |
-
1986
- 1986-01-20 JP JP668186U patent/JPS62118442U/ja active Pending