JPS62118235U - - Google Patents

Info

Publication number
JPS62118235U
JPS62118235U JP676786U JP676786U JPS62118235U JP S62118235 U JPS62118235 U JP S62118235U JP 676786 U JP676786 U JP 676786U JP 676786 U JP676786 U JP 676786U JP S62118235 U JPS62118235 U JP S62118235U
Authority
JP
Japan
Prior art keywords
pattern
light
exposure amount
width
shielding
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP676786U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP676786U priority Critical patent/JPS62118235U/ja
Publication of JPS62118235U publication Critical patent/JPS62118235U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP676786U 1986-01-20 1986-01-20 Pending JPS62118235U (US06650917-20031118-M00005.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP676786U JPS62118235U (US06650917-20031118-M00005.png) 1986-01-20 1986-01-20

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP676786U JPS62118235U (US06650917-20031118-M00005.png) 1986-01-20 1986-01-20

Publications (1)

Publication Number Publication Date
JPS62118235U true JPS62118235U (US06650917-20031118-M00005.png) 1987-07-27

Family

ID=30789590

Family Applications (1)

Application Number Title Priority Date Filing Date
JP676786U Pending JPS62118235U (US06650917-20031118-M00005.png) 1986-01-20 1986-01-20

Country Status (1)

Country Link
JP (1) JPS62118235U (US06650917-20031118-M00005.png)

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