JPS62118168U - - Google Patents
Info
- Publication number
- JPS62118168U JPS62118168U JP436886U JP436886U JPS62118168U JP S62118168 U JPS62118168 U JP S62118168U JP 436886 U JP436886 U JP 436886U JP 436886 U JP436886 U JP 436886U JP S62118168 U JPS62118168 U JP S62118168U
- Authority
- JP
- Japan
- Prior art keywords
- shutter
- chamber
- source
- vacuum evaporation
- sample
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000007738 vacuum evaporation Methods 0.000 claims 3
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP436886U JPS62118168U (https=) | 1986-01-16 | 1986-01-16 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP436886U JPS62118168U (https=) | 1986-01-16 | 1986-01-16 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62118168U true JPS62118168U (https=) | 1987-07-27 |
Family
ID=30784971
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP436886U Pending JPS62118168U (https=) | 1986-01-16 | 1986-01-16 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62118168U (https=) |
-
1986
- 1986-01-16 JP JP436886U patent/JPS62118168U/ja active Pending
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