JPS62117522U - - Google Patents
Info
- Publication number
- JPS62117522U JPS62117522U JP553386U JP553386U JPS62117522U JP S62117522 U JPS62117522 U JP S62117522U JP 553386 U JP553386 U JP 553386U JP 553386 U JP553386 U JP 553386U JP S62117522 U JPS62117522 U JP S62117522U
- Authority
- JP
- Japan
- Prior art keywords
- vortex
- diaphragm
- fixed
- movable electrode
- electrode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000012212 insulator Substances 0.000 claims 1
- 239000010409 thin film Substances 0.000 claims 1
- 238000001514 detection method Methods 0.000 description 3
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 239000012790 adhesive layer Substances 0.000 description 1
- 239000011889 copper foil Substances 0.000 description 1
- 239000010410 layer Substances 0.000 description 1
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 229920001721 polyimide Polymers 0.000 description 1
Landscapes
- Measuring Volume Flow (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP553386U JPS62117522U (de) | 1986-01-18 | 1986-01-18 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP553386U JPS62117522U (de) | 1986-01-18 | 1986-01-18 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62117522U true JPS62117522U (de) | 1987-07-25 |
Family
ID=30787204
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP553386U Pending JPS62117522U (de) | 1986-01-18 | 1986-01-18 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62117522U (de) |
-
1986
- 1986-01-18 JP JP553386U patent/JPS62117522U/ja active Pending