JPS62116539U - - Google Patents
Info
- Publication number
- JPS62116539U JPS62116539U JP319286U JP319286U JPS62116539U JP S62116539 U JPS62116539 U JP S62116539U JP 319286 U JP319286 U JP 319286U JP 319286 U JP319286 U JP 319286U JP S62116539 U JPS62116539 U JP S62116539U
- Authority
- JP
- Japan
- Prior art keywords
- clamping
- stopper member
- wafer
- elastic stopper
- clamping surface
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 210000000078 claw Anatomy 0.000 claims description 2
Landscapes
- Gripping Jigs, Holding Jigs, And Positioning Jigs (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP319286U JPS62116539U (is) | 1986-01-14 | 1986-01-14 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP319286U JPS62116539U (is) | 1986-01-14 | 1986-01-14 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62116539U true JPS62116539U (is) | 1987-07-24 |
Family
ID=30782724
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP319286U Pending JPS62116539U (is) | 1986-01-14 | 1986-01-14 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62116539U (is) |
-
1986
- 1986-01-14 JP JP319286U patent/JPS62116539U/ja active Pending