JPS62116180U - - Google Patents
Info
- Publication number
- JPS62116180U JPS62116180U JP1986003779U JP377986U JPS62116180U JP S62116180 U JPS62116180 U JP S62116180U JP 1986003779 U JP1986003779 U JP 1986003779U JP 377986 U JP377986 U JP 377986U JP S62116180 U JPS62116180 U JP S62116180U
- Authority
- JP
- Japan
- Prior art keywords
- gas introduction
- piezo valve
- voltage pulse
- flow rate
- introduction device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986003779U JPH0210316Y2 (enExample) | 1986-01-14 | 1986-01-14 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986003779U JPH0210316Y2 (enExample) | 1986-01-14 | 1986-01-14 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62116180U true JPS62116180U (enExample) | 1987-07-23 |
| JPH0210316Y2 JPH0210316Y2 (enExample) | 1990-03-14 |
Family
ID=30783853
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1986003779U Expired JPH0210316Y2 (enExample) | 1986-01-14 | 1986-01-14 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0210316Y2 (enExample) |
-
1986
- 1986-01-14 JP JP1986003779U patent/JPH0210316Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0210316Y2 (enExample) | 1990-03-14 |