JPS62116180U - - Google Patents

Info

Publication number
JPS62116180U
JPS62116180U JP1986003779U JP377986U JPS62116180U JP S62116180 U JPS62116180 U JP S62116180U JP 1986003779 U JP1986003779 U JP 1986003779U JP 377986 U JP377986 U JP 377986U JP S62116180 U JPS62116180 U JP S62116180U
Authority
JP
Japan
Prior art keywords
gas introduction
piezo valve
voltage pulse
flow rate
introduction device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1986003779U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0210316Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1986003779U priority Critical patent/JPH0210316Y2/ja
Publication of JPS62116180U publication Critical patent/JPS62116180U/ja
Application granted granted Critical
Publication of JPH0210316Y2 publication Critical patent/JPH0210316Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
JP1986003779U 1986-01-14 1986-01-14 Expired JPH0210316Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1986003779U JPH0210316Y2 (enrdf_load_stackoverflow) 1986-01-14 1986-01-14

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986003779U JPH0210316Y2 (enrdf_load_stackoverflow) 1986-01-14 1986-01-14

Publications (2)

Publication Number Publication Date
JPS62116180U true JPS62116180U (enrdf_load_stackoverflow) 1987-07-23
JPH0210316Y2 JPH0210316Y2 (enrdf_load_stackoverflow) 1990-03-14

Family

ID=30783853

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986003779U Expired JPH0210316Y2 (enrdf_load_stackoverflow) 1986-01-14 1986-01-14

Country Status (1)

Country Link
JP (1) JPH0210316Y2 (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH0210316Y2 (enrdf_load_stackoverflow) 1990-03-14

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