JPS62115613U - - Google Patents
Info
- Publication number
- JPS62115613U JPS62115613U JP389986U JP389986U JPS62115613U JP S62115613 U JPS62115613 U JP S62115613U JP 389986 U JP389986 U JP 389986U JP 389986 U JP389986 U JP 389986U JP S62115613 U JPS62115613 U JP S62115613U
- Authority
- JP
- Japan
- Prior art keywords
- thin film
- measuring
- substrate
- thickness
- measuring means
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000010409 thin film Substances 0.000 claims 5
- 239000000758 substrate Substances 0.000 claims 2
- 238000000151 deposition Methods 0.000 claims 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
Landscapes
- Length Measuring Devices With Unspecified Measuring Means (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP389986U JPS62115613U (cs) | 1986-01-13 | 1986-01-13 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP389986U JPS62115613U (cs) | 1986-01-13 | 1986-01-13 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62115613U true JPS62115613U (cs) | 1987-07-23 |
Family
ID=30784078
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP389986U Pending JPS62115613U (cs) | 1986-01-13 | 1986-01-13 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62115613U (cs) |
-
1986
- 1986-01-13 JP JP389986U patent/JPS62115613U/ja active Pending
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