JPS62115372U - - Google Patents
Info
- Publication number
- JPS62115372U JPS62115372U JP421286U JP421286U JPS62115372U JP S62115372 U JPS62115372 U JP S62115372U JP 421286 U JP421286 U JP 421286U JP 421286 U JP421286 U JP 421286U JP S62115372 U JPS62115372 U JP S62115372U
- Authority
- JP
- Japan
- Prior art keywords
- container
- stopper
- wedge
- shaped
- inner stopper
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004519 manufacturing process Methods 0.000 claims description 3
- 239000004065 semiconductor Substances 0.000 claims description 3
- 239000000126 substance Substances 0.000 claims description 3
- 239000003814 drug Substances 0.000 claims 1
- 229940079593 drug Drugs 0.000 claims 1
- 239000000428 dust Substances 0.000 claims 1
- 238000007789 sealing Methods 0.000 claims 1
Landscapes
- Closures For Containers (AREA)
- Devices For Use In Laboratory Experiments (AREA)
- Weting (AREA)
Description
第１図は、本考案の半導体製造用薬液容器の一
実施例を示す断面図であり、第２図は従来の半導
体製造用薬液容器の断面図、第３図はくさび形ス
トツパーの拡大図である。
尚、図において、１……外栓、２……内栓、２
ａ……ノツチ、２ｂ……くさび形ストツパー（内
栓）、３……容器本体、３ａ……くさび形ストツ
パー（容器）、Ａ……平滑部有りくさび形ストツ
パー、Ｂ……平滑部なしくさび形ストツパー。
FIG. 1 is a cross-sectional view showing an embodiment of a chemical container for semiconductor manufacturing according to the present invention, FIG. 2 is a cross-sectional view of a conventional chemical container for semiconductor manufacturing, and FIG. 3 is an enlarged view of a wedge-shaped stopper. be. In addition, in the figure, 1...outer plug, 2...inner plug, 2
a... Notch, 2b... Wedge-shaped stopper (inner plug), 3... Container body, 3a... Wedge-shaped stopper (container), A... Wedge-shaped stopper with smooth part, B... Wedge-shaped without smooth part Stopper.
Claims (1)
記容器のキヤツプの内栓の擦り合わせによつて起
こるゴミの発生を防止するために、前記容器の口
と前記内栓に互いにかみ合うくさび形のストツパ
ーとを有することを特徴とする半導体製造用薬液
容器。 In order to prevent dust from being generated due to friction between a drug solution container having a notch-shaped sealing system and the inner stopper of the cap of the container, a wedge-shaped stopper that engages with the opening of the container and the inner stopper is provided. A chemical solution container for semiconductor manufacturing, characterized by comprising:
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP421286U JPS62115372U (en) | 1986-01-14 | 1986-01-14 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP421286U JPS62115372U (en) | 1986-01-14 | 1986-01-14 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62115372U true JPS62115372U (en) | 1987-07-22 |
Family
ID=30784675
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP421286U Pending JPS62115372U (en) | 1986-01-14 | 1986-01-14 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62115372U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106809500A (en) * | 2015-11-30 | 2017-06-09 | 成甫渊 | Container cover assembly |
| JP2018503563A (en) * | 2015-11-30 | 2018-02-08 | ボ ユン スン、 | Container cap assembly |
-
1986
- 1986-01-14 JP JP421286U patent/JPS62115372U/ja active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106809500A (en) * | 2015-11-30 | 2017-06-09 | 成甫渊 | Container cover assembly |
| JP2018503563A (en) * | 2015-11-30 | 2018-02-08 | ボ ユン スン、 | Container cap assembly |
| US10604306B2 (en) | 2015-11-30 | 2020-03-31 | Dae Suck KANG | Assembled container cap |
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