JPS62115110U - - Google Patents

Info

Publication number
JPS62115110U
JPS62115110U JP18491185U JP18491185U JPS62115110U JP S62115110 U JPS62115110 U JP S62115110U JP 18491185 U JP18491185 U JP 18491185U JP 18491185 U JP18491185 U JP 18491185U JP S62115110 U JPS62115110 U JP S62115110U
Authority
JP
Japan
Prior art keywords
electrode
pressure
capacitor
resonant circuit
pressure sensor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP18491185U
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP18491185U priority Critical patent/JPS62115110U/ja
Publication of JPS62115110U publication Critical patent/JPS62115110U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Measuring Fluid Pressure (AREA)

Description

【図面の簡単な説明】[Brief explanation of the drawing]

第１図ないし第５図は本考案の一実施例を示す
もので、第１図は中央縦断面図、第２図は第１図
におけるＡ―Ａ断面図、第３図は第１図における
Ｂ―Ｂ断面図、第４図は第１図におけるＤ―Ｄ断
面図、第５図は等価的な回路図、第６図イ，ロは
本考案の他の実施例における可動電極および固定
電極の平面図である。 １…基板、１ａ…台座、１ｂ…通孔、２ａ，２
ｂ，２ａ′，２ｂ′…固定電極、２ｃ，２ｃ′…
分離帯、３…リード、４…コイル、５…ダイヤフ
ラム、６，６′…可動電極、６ａ，６ａ′…電極
片、７…真空容器、８…ピツクアツプコイル。 Figures 1 to 5 show an embodiment of the present invention, in which Figure 1 is a central vertical sectional view, Figure 2 is a sectional view taken along line AA in Figure 1, and Figure 3 is a cross-sectional view taken along line AA in Figure 1. BB sectional view, FIG. 4 is a DD sectional view in FIG. 1, FIG. 5 is an equivalent circuit diagram, and FIG. 6 A and B are movable and fixed electrodes in other embodiments of the present invention. FIG. 1...Substrate, 1a...Pedestal, 1b...Through hole, 2a, 2
b, 2a', 2b'... fixed electrode, 2c, 2c'...
Separation band, 3... Lead, 4... Coil, 5... Diaphragm, 6, 6'... Movable electrode, 6a, 6a'... Electrode piece, 7... Vacuum vessel, 8... Pick-up coil.

Claims (1)

【実用新案登録請求の範囲】 基板に形成した固定電極と感圧用のダイアフラ
ムに形成した圧力に応動する可動電極とを具備す
るコンデンサと、コイルとによつてＬＣ共振回路
を形成し、印加圧力に応じて変化する前記コンデ
ンサの静電容量に伴つて変化する前記ＬＣ共振回
路の共振周波数を検出して印加圧力を測定するよ
うにした静電容量型圧力センサにおいて、 前記固定電極または可動電極のうちの一方の電
極を小片状の複数の電極片に分割して形成すると
共に、他方の電極を複数の分離溝によつて櫛状に
形成したことを特徴とする静電容量型圧力センサ
。[Claims for Utility Model Registration] An LC resonant circuit is formed by a coil and a capacitor that has a fixed electrode formed on a substrate and a movable electrode that responds to pressure formed on a pressure-sensitive diaphragm. In a capacitive pressure sensor that measures applied pressure by detecting a resonant frequency of the LC resonant circuit that changes with the capacitance of the capacitor that changes accordingly, one of the fixed electrode and the movable electrode A capacitive pressure sensor characterized in that one electrode is formed by dividing into a plurality of small electrode pieces, and the other electrode is formed in a comb shape with a plurality of separation grooves.
JP18491185U 1985-11-29 1985-11-29 Pending JPS62115110U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18491185U JPS62115110U (en) 1985-11-29 1985-11-29

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18491185U JPS62115110U (en) 1985-11-29 1985-11-29

Publications (1)

Publication Number Publication Date
JPS62115110U true JPS62115110U (en) 1987-07-22

Family

ID=31133041

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18491185U Pending JPS62115110U (en) 1985-11-29 1985-11-29

Country Status (1)

Country Link
JP (1) JPS62115110U (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003506706A (en) * 1999-08-06 2003-02-18 セトラ システムズ インコーポレイテッド Capacitive pressure sensor with encapsulated resonant member
JP2007502416A (en) * 2003-08-11 2007-02-08 アナログ デバイシーズ インク Capacitive sensor

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5037480A (en) * 1973-08-06 1975-04-08
JPS54121958A (en) * 1978-03-14 1979-09-21 Nichicon Capacitor Ltd Electrolytic capacitor

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5037480A (en) * 1973-08-06 1975-04-08
JPS54121958A (en) * 1978-03-14 1979-09-21 Nichicon Capacitor Ltd Electrolytic capacitor

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003506706A (en) * 1999-08-06 2003-02-18 セトラ システムズ インコーポレイテッド Capacitive pressure sensor with encapsulated resonant member
JP2007502416A (en) * 2003-08-11 2007-02-08 アナログ デバイシーズ インク Capacitive sensor

Similar Documents

Publication Publication Date Title
JPS62115110U (en)
JPS6413119U (en)
JPH01143600U (en)
JPH036537U (en)
JPS596744U (en) pressure sensor
JPS62104130U (en)
JPS6214715U (en)
JPH01102841U (en)
JPS61174644U (en)
JPS6370045U (en)
JPS61155749U (en)
JPS6262944U (en)
JPS6160599U (en)
JPS6321815U (en)
JPS6251058U (en)
JPS61139028U (en)
JPS62171120U (en)
JPS5834024U (en) High frequency bonding machine temperature measuring device
JPS58140445U (en) Capacitive pressure detector
JPS61119736U (en)
JPH0227541U (en)
JPS60143338U (en) differential pressure transmitter
JPS59161051U (en) pressure gauge
JPS635462U (en)
JPS58136746U (en) pressure gauge