JPS62115027U - - Google Patents

Info

Publication number
JPS62115027U
JPS62115027U JP125386U JP125386U JPS62115027U JP S62115027 U JPS62115027 U JP S62115027U JP 125386 U JP125386 U JP 125386U JP 125386 U JP125386 U JP 125386U JP S62115027 U JPS62115027 U JP S62115027U
Authority
JP
Japan
Prior art keywords
air conditioning
air
clean room
clean
filter unit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP125386U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP125386U priority Critical patent/JPS62115027U/ja
Publication of JPS62115027U publication Critical patent/JPS62115027U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Ventilation (AREA)
  • Filtering Of Dispersed Particles In Gases (AREA)
JP125386U 1986-01-09 1986-01-09 Pending JPS62115027U (ru)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP125386U JPS62115027U (ru) 1986-01-09 1986-01-09

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP125386U JPS62115027U (ru) 1986-01-09 1986-01-09

Publications (1)

Publication Number Publication Date
JPS62115027U true JPS62115027U (ru) 1987-07-22

Family

ID=30778990

Family Applications (1)

Application Number Title Priority Date Filing Date
JP125386U Pending JPS62115027U (ru) 1986-01-09 1986-01-09

Country Status (1)

Country Link
JP (1) JPS62115027U (ru)

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